JP3942379B2 - Positioning member for precision substrate storage container - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a positioning member for a precision substrate storage container that is used for storing, storing and storing precision substrates such as silicon wafers, mask glass, etc., in-process conveyance, or for positioning connection to various automatic machines.
[0002]
[Prior art]
Precision substrates such as silicon wafers require a clean environment for transportation and storage processes to avoid contamination by fine dust, and automated equipment to avoid dust generation or contamination by workers Handled by. Therefore, the precision substrate storage container is accommodated in the precision substrate storage container so that the precision substrate engages with the automated apparatus, for example, a processing apparatus for processing the precision substrate, and is fixed at a predetermined position. Is provided with a positioning member.
[0003]
As shown in FIG. 5, the precision substrate storage container includes a container body 51 that has an opening and stores the precision substrate therein, and a lid 52 that closes the opening. On the opposing inner walls of the container main body 51, support portions 53 for storing the precision substrates in a horizontal state are provided at regular intervals. At least a pair of lid body locking portions 54 for locking the lid body 52 to the container body 51 are formed on the periphery of the opening of the container body 51.
[0004]
Further, a robotic handle 55 for automatic conveyance and a handle 56 for manual conveyance are attached to the outer wall of the container body 51 as necessary. A pair of locking means 57 having a locking portion that fits with the lid locking portion 54 of the container main body 51 is fixed to the side wall of the lid 52. When the lid body 52 is locked to the container main body 51, a convex portion that fits into a step portion on the inner periphery of the opening of the container main body 51 is formed on the surface facing the inner side of the container main body 51. A sealing member 58 having an endless shape for maintaining the sealing performance of the precision substrate storage container 50 is attached to the periphery of.
[0005]
Furthermore, a retainer 59 that contacts and holds the precision substrate is attached to the inner surface of the lid 52. A V-shaped or U-shaped groove is formed in the contact portion at the tip of the retainer 59 to hold the precision substrate at the correct position.
[0006]
As a general positioning mechanism in the precision substrate storage container and the processing apparatus, there is one using a fitting between a concave member and a convex member. For example, a plurality of concave portions having a V-shaped cross section, which is a positioning member, are provided on the bottom surface of the container body of the precision substrate storage container, and positioning pins that are convex members are provided on the side of the processing apparatus, etc. Some of them define the positional relationship between the precision substrate storage container and the processing apparatus by being fitted to each other.
[0007]
As a method of providing the concave portion in the precision substrate storage container, a method of attaching a concave material manufactured as a separate part to the precision substrate storage container by bonding or screwing, a method of injection molding the concave portion material integrally with the precision substrate storage container And the method described in JP-A-11-168136, that is, as shown in FIG. 6, a plurality of inclined surfaces having a V-shaped cross section serving as a guide portion to the positioning pin in the positioning mechanism, for example, There is a method in which the bottom plate 62 of the plate-like member formed at three places is attached by being engaged with the centering portion formed on the bottom surface 63 of the container main body 51 of the precision substrate storage container. A positioning member 70 is formed by the guide portion and the centering portion.
[0008]
In the positioning mechanism, as shown in FIG. 7, the positioning member 70 includes a guiding portion 70 a formed on the bottom plate 62 and a centering portion 70 b formed on the bottom surface 63 of the container main body 51 located at the back of the groove. It consists of. The guiding portion 70a and the centering portion 70b are connected by the same inclined surface, and form a groove 71 having a V-shaped cross section. A positioning pin 72 of a processing device or the like is guided by the inclined surface and automatically centered to contact the centering portion 70b, and the precision substrate storage container is positioned with respect to the processing device or the like.
[0009]
A positioning mechanism composed of a positioning pin of the processing apparatus or the like and a positioning member of the precision substrate storage container is required to have high accuracy in the storage position accuracy in the vertical direction of the precision substrate. In addition, particularly high positional accuracy is required for high-speed access to increase the productivity of precision substrates. In the conventional positioning mechanism, a guide portion 70a is provided on a plate-like bottom plate 62 attached to the bottom surface 63 of the container body 51 of the precision substrate storage container, and the centering is performed to fit the guide portion 70a on the bottom surface 63 of the container body 51. The portion 70b is provided to obtain the required positioning accuracy.
[0010]
[Problems to be solved by the invention]
However, since a slight step or gap is generated at the boundary between the guide portion and the centering portion, the tip of the positioning pin provided on the reference horizontal surface of the processing device or the like is caught by the boundary and stops. was there.
[0011]
Furthermore, if the positioning pin is caught in the middle of the guiding portion and stopped, the positioning of the processing device and the precision substrate storage container will not be performed correctly, so that the subsequent lid opening / closing operation and the precision substrate after the lid removal There was a problem that trouble occurred because loading and unloading operations could not be performed normally.
[0012]
Further, in the conventional positioning member, the positioning pin of the processing device or the like is unstable just by making point contact with each of the V-shaped inclined surfaces of the centering portion. There has been a problem that the precision substrate storage container is displaced from the correct position due to vibration or impact when moving the container.
[0013]
The present invention has been made to solve the above-described conventional problems, and the positioning pin of the processing apparatus or the like does not stop by being caught by the positioning member provided on the bottom surface of the container body of the precision substrate storage container. It is an object to provide a positioning member for a precision substrate storage container that does not cause a positional shift with respect to a processing apparatus or the like due to vibration or impact.
[0014]
[Means for Solving the Problems]
The present invention is provided on the bottom surface of the container body of a precision substrate storage container having a container body for storing a precision substrate and a lid for closing an opening provided in the container body, and processes the precision substrate. a positioning member of a precision substrate storage container used for engagement with the positioning pins of the processing apparatus for, a concave portion at the back portion of the leading portion and the groove the positioning member has a V-shaped groove and a centering portion in step or without gaps integrally, the recess of the centering unit which tip of said positioning pin is fitted to the semi-circular curved surface, different from the container body to the positioning member material having The positioning member of the precision substrate storage container is formed by the method and integrated with the bottom surface of the container body .
[0015]
Further, the inclined surface of the V-shaped groove of the guide portion may be one that is formed in the cross-section concave, the V-shaped groove, the inclined surface of the guide portion, the inclined surface It may be formed from an inclined surface of the concave portion that is connected and steeper than the inclined surface.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a cross-sectional view showing a first embodiment of a positioning member of a precision substrate storage container according to the present invention. FIG. 2 is a cross-sectional view showing a second embodiment of the positioning member of the precision substrate storage container according to the present invention. FIG. 3 is a sectional view showing a third embodiment of the positioning member of the precision substrate storage container according to the present invention. FIG. 4 is a bottom view of the container body of the precision substrate storage container provided with any of the positioning members shown in FIGS. 1 to 3.
[0017]
As shown in FIG. 1, the positioning member 10 of the precision substrate storage container according to the present invention is provided on the bottom surface 12 of the container body 11 of the precision substrate storage container as shown in FIG. 4, and has a groove 13 having a V-shaped cross section. The guide portion 14 and a centering portion 17 having a recess 16 into which a tip end portion of a positioning pin 15 such as a processing apparatus for processing a precision substrate is fitted in the back of the groove 11 are provided.
[0018]
The concave portion 16 forms a semicircular curved surface portion that follows the tip shape of the positioning pin 15, and the positioning pin 15 fits into the concave portion 16.
[0019]
When the precision substrate storage container is mounted on the positioning pin 15, the positioning member 10 that contacts the positioning pin 15 automatically reaches the deepest position of the groove 13 having a V-shaped cross section formed by the opposed inclined surfaces. By centripeting, the processing apparatus and the precision substrate storage container are positioned with high accuracy.
[0020]
Further, since the positioning member 10 is formed such that the guiding portion 14 and the centering portion 17 are integrated or closely adhered, there is no step or gap between the inclined surface of the guiding portion 14 and the inclined surface of the centering portion 17. Therefore, when positioning the precision substrate storage container, the positioning pin 15 is not caught by being stopped in the middle of the groove 13 having the V-shaped cross section.
[0021]
As described above, the positioning pin 15 and the positioning member 10 are fitted to each other so that the precision substrate storage container can be surely positioned. Even when the precision substrate storage container is moved on a processing apparatus or the like, the predetermined position is determined. There is no deviation from the position.
[0022]
Next, the positioning member 20 of the precision substrate storage container according to the second embodiment of the present invention will be described. As shown in FIG. 2, the positioning member 20 is provided on the bottom surface 12 of the container body 11 of the precision substrate storage container as shown in FIG. 4, and a guide portion 22 having a groove 21 having a V-shaped cross section, A centering portion 23 having a recess 25 into which a tip end portion of a positioning pin 15 such as a processing apparatus for processing a precision substrate is fitted in the back, and the inclined surface 24 of the guide portion 22 is formed in a concave shape in cross section. It is what.
[0023]
When the precision substrate storage container is mounted on the positioning pin 15, the positioning member 20 that contacts the positioning pin 15 automatically reaches the deepest position of the groove 21 having a V-shaped cross section formed by the opposed inclined surfaces. By centripeting, the processing apparatus and the precision substrate storage container are positioned with high accuracy.
[0024]
In addition, since the positioning member 20 is formed such that the guide portion 22 and the centering portion 23 are integrated or in close contact with each other, there is a step or gap between the inclined surface 24 of the guide portion 22 and the inclined surface of the centering portion 23. Therefore, at the time of positioning the precision substrate storage container, the positioning pin 15 is not caught by being stopped in the middle of the groove 21 having the V-shaped cross section.
[0025]
Next, the positioning member 30 of the precision substrate storage container according to the third embodiment of the present invention will be described. As shown in FIG. 3, the positioning member 30 is provided on the bottom surface 12 of the container body 11 of the precision substrate storage container as shown in FIG. 4, and a guide portion 32 having a groove 31 having a V-shaped cross section, And a centering portion 34 having a recess 33 into which a tip portion of a positioning pin 15 such as a processing apparatus for processing a precision substrate is fitted, and the groove 31 having a V-shaped cross section is an inclined surface 35 of the guide portion 32. And an inclined surface 36 of the concave portion 33 connected to the inclined surface 35 and steeper than the inclined surface 35.
[0026]
The inclined surface 35 of the guide portion 32 is formed at an angle (θ1) in the range of 15 ° to 60 ° with respect to a reference horizontal surface 37 of the processing device or the like, and the inclined surface 36 of the concave portion 33 of the centering portion 34 is 30 °. It is formed at an angle (θ2) in a range of ˜70 °, and the angle (θ2) of the inclined surface 36 is formed to be larger than the angle (θ1) of the inclined surface 35. That is, θ2> θ1.
[0027]
The angle (θ1) of the inclined surface 35 of the guide portion 32 is preferably in the range of 40 ° to 50 °, and the angle (θ2) of the inclined surface 36 of the concave portion 33 of the centering portion 34 is 45 ° to 65. An angle in the range of ° is preferred.
[0028]
Since the centering portion 34 is formed in the concave portion 33 having the inclined surface 36 that is steeper than the inclined surface 35 of the guide portion 32 in this manner, the positioning pin 15 is fitted into the centering portion 34. Will not shift during use.
[0029]
When the precision substrate storage container is mounted on the positioning pin 15, the positioning member 30 that comes into contact with the positioning pin 15 automatically reaches the deepest position of the groove 31 having a V-shaped cross section formed by the opposed inclined surfaces. By centripeting, the processing apparatus and the precision substrate storage container are positioned with high accuracy.
[0030]
Further, since the positioning member 30 is formed such that the guiding portion 32 and the centering portion 34 are integrated or closely adhered, a step or gap is formed between the inclined surface 35 of the guiding portion 32 and the inclined surface 36 of the centering portion 34. Therefore, when positioning the precision substrate storage container, the positioning pin 15 is not caught in the middle of the V-shaped groove 31 and stopped.
[0031]
In addition, the positioning members 10, 20, and 30 of the precision substrate storage container according to the embodiment of the present invention have good moldability, excellent mechanical properties, and contamination characteristics of the container body 11 and the lid (not shown). Molded from thermoplastic resins such as polycarbonate resin, polybutylene terephthalate, polyether sulfone, and polypropylene. In particular, a thermoplastic resin such as a polycarbonate resin, a norbornene-based resin, or an acrylic resin having good transparency is preferable. If necessary, an antistatic agent for imparting antistatic performance and conductivity or an additive for a conductive material may be added to the above-described resin.
[0032]
As shown in FIG. 4, the positioning members 10, 20, and 30 are, for example, three locations, one side on the opening 18 side and the other side on the bottom surface 12 of the container body 11, and the center on the side opposite to the opening. Are arranged in a substantially Y shape. On the stage of the processing apparatus or the like on which the precision substrate storage container is mounted, positioning pins 15 are arranged at three positions so as to contact the positioning members 10, 20, and 30. The positioning pin 15 is formed of a material such as SUS, and the tip portion is processed into a hemispherical shape or an R shape.
[0033]
Further, the positioning members 10, 20, and 30 may be formed as separate parts by using a material different from that of the container main body 11 in addition to those formed integrally with the container main body 11. These may be integrated at a predetermined position by ultrasonic welding, heat welding, or the like. When the positioning members 10, 20, 30 are formed as separate parts, they can be integrated by forming welding ribs or recesses on the joint surface with the container body 11 and fusing them to the container body 11. .
[0034]
As described above, the positioning pins 15 are fitted to the deepest positions of the grooves 13, 21, and 31 having V-shaped cross sections on the positioning members 10, 20, and 30 of the precision substrate storage container according to the embodiment of the present invention. By forming the centering portions 17, 23, and 34, the positioning pins 15 and the centering portions 17, 23, and 34 of the positioning members 10, 20, and 30 are fitted to each other so that the precision substrate storage container can be positioned reliably. Even when the precision substrate storage container positioned on the processing apparatus or the like is moved, the precision substrate storage container does not deviate from the predetermined position where it is positioned. Further, the positioning pin 15 is not caught in the middle of the V-shaped grooves 13, 21, 31 of the positioning members 10, 20, 30 and stopped.
[0035]
Further, the positioning members 10, 20, and 30 of the precision substrate storage container are shaped along the outer periphery of the positioning pin 15, and the centering portions 17, 23, and 34 into which the positioning pin 15 is fitted can be positioned with high accuracy. In addition, since the position does not shift during use, it can be used to stably load and unload precision substrates.
[0036]
In addition to the processing device that performs various processes and processing on the precision substrate, the processing device or the like is an operation of transferring the precision substrate between the in-process transport container such as a cassette and the transport precision substrate storage container. This means a precision substrate transfer device, etc.
[0037]
【The invention's effect】
According to the present invention, since the centering portion of the positioning member of the precision substrate storage container is fitted into the positioning pin of the processing apparatus or the like that processes the precision substrate, the precision substrate storage container is positioned between the positioning member and the processing apparatus or the like. The pin is accurately and reliably positioned by the pin.
Further, the positioning pin is not caught by being stopped in the middle of the V-shaped groove of the positioning member.
In addition, since the centering portion has a fitting portion for holding the positioning pin, the precision substrate storage container mounted on the processing apparatus or the like is in the fitting position with the positioning pin even during the operation of moving the precision substrate. Therefore, it is possible to safely load and unload precision substrates.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing a first embodiment of a positioning member of a precision substrate storage container according to the present invention.
FIG. 2 is a cross-sectional view showing a second embodiment of the positioning member of the precision substrate storage container according to the present invention.
FIG. 3 is a cross-sectional view showing a third embodiment of a positioning member of a precision substrate storage container according to the present invention.
4 is a bottom view of a container body of a precision substrate storage container including any one of the positioning members shown in FIGS. 1 to 3. FIG.
FIG. 5 is an exploded perspective view of a conventional precision substrate storage container.
FIG. 6 is a bottom perspective view of a container body of a conventional precision substrate storage container.
7 is a cross-sectional view taken along line AA in FIG.
[Explanation of symbols]
10, 20, 30 Positioning member 11, 51 Container body 12, 63 Bottom surface 13, 21, 31, 71 Groove 14, 22, 32 Guide portion 15, 72 Positioning pin 16, 25, 33 Recessed portion 17, 23, 34 Centering portion 18 Opening 24, 35, 36 Inclined surface 37 Reference horizontal plane 50 Precision substrate storage container 52 Lid 53 Support unit 54 Lid locking unit 55 Robotic handle 56 Handle 57 Locking means 58 Seal member 59 Retainer 62 Bottom plate 70 Positioning Member 70a Guide part 70b Centering part

Claims (2)

A processing apparatus for processing the precision substrate, which is provided on the bottom surface of the container body of the precision substrate storage container having a container body for storing the precision substrate and a lid for closing an opening provided in the container body. A positioning member for a precision substrate storage container used for engagement with a positioning pin on the side ,
The core of the positioning member and a centering portion in step or without gaps integrally having a concave portion at the back portion of the leading portion and said groove having a V-shaped groove, the tip of the positioning pin is fitted It said out portion concave portion and semi-circular curved surface, the positioning member positioning member of the precision substrate storage container, characterized in that integrated into the bottom surface of the container body is formed from a material different from that of the container body. The positioning member is characterized in that a concave portion is a semicircular curved surface at the back of the groove formed in the guide portion, and an inclined surface of the guide portion that guides the positioning pin is concave in cross section. The positioning member of the precision substrate storage container according to claim 1 .

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