JPS61201669A - 窒化アルミニウム焼結体及びその製造方法 - Google Patents
窒化アルミニウム焼結体及びその製造方法Info
- Publication number
- JPS61201669A JPS61201669A JP60040755A JP4075585A JPS61201669A JP S61201669 A JPS61201669 A JP S61201669A JP 60040755 A JP60040755 A JP 60040755A JP 4075585 A JP4075585 A JP 4075585A JP S61201669 A JPS61201669 A JP S61201669A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum nitride
- sintered body
- sintering
- nitride
- nitride sintered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims description 58
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 238000005245 sintering Methods 0.000 claims description 38
- 239000000843 powder Substances 0.000 claims description 19
- 239000011812 mixed powder Substances 0.000 claims description 13
- 150000004767 nitrides Chemical class 0.000 claims description 12
- 230000000737 periodic effect Effects 0.000 claims description 10
- 239000007789 gas Substances 0.000 claims description 8
- 230000001590 oxidative effect Effects 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 2
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 2
- 239000001307 helium Substances 0.000 claims description 2
- 229910052734 helium Inorganic materials 0.000 claims description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 2
- AJXBBNUQVRZRCZ-UHFFFAOYSA-N azanylidyneyttrium Chemical compound [Y]#N AJXBBNUQVRZRCZ-UHFFFAOYSA-N 0.000 description 11
- 238000000034 method Methods 0.000 description 7
- 238000002156 mixing Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- BCZWPKDRLPGFFZ-UHFFFAOYSA-N azanylidynecerium Chemical compound [Ce]#N BCZWPKDRLPGFFZ-UHFFFAOYSA-N 0.000 description 4
- CUOITRGULIVMPC-UHFFFAOYSA-N azanylidynescandium Chemical compound [Sc]#N CUOITRGULIVMPC-UHFFFAOYSA-N 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 229910052746 lanthanum Inorganic materials 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910052727 yttrium Inorganic materials 0.000 description 3
- 229910052684 Cerium Inorganic materials 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 150000002222 fluorine compounds Chemical class 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000005022 packaging material Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 229910052706 scandium Inorganic materials 0.000 description 2
- 241000282326 Felis catus Species 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- QCLQZCOGUCNIOC-UHFFFAOYSA-N azanylidynelanthanum Chemical compound [La]#N QCLQZCOGUCNIOC-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- -1 calcium nitride Chemical class 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000001272 pressureless sintering Methods 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
- 229940105963 yttrium fluoride Drugs 0.000 description 1
- RBORBHYCVONNJH-UHFFFAOYSA-K yttrium(iii) fluoride Chemical compound F[Y](F)F RBORBHYCVONNJH-UHFFFAOYSA-K 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60040755A JPS61201669A (ja) | 1985-03-01 | 1985-03-01 | 窒化アルミニウム焼結体及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60040755A JPS61201669A (ja) | 1985-03-01 | 1985-03-01 | 窒化アルミニウム焼結体及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61201669A true JPS61201669A (ja) | 1986-09-06 |
| JPH057349B2 JPH057349B2 (enExample) | 1993-01-28 |
Family
ID=12589439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60040755A Granted JPS61201669A (ja) | 1985-03-01 | 1985-03-01 | 窒化アルミニウム焼結体及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61201669A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61205670A (ja) * | 1985-03-07 | 1986-09-11 | 住友電気工業株式会社 | 窒化アルミニウム焼結体およびその製造方法 |
| JPS61209959A (ja) * | 1985-03-13 | 1986-09-18 | 株式会社東芝 | 窒化アルミニウム焼結体の製造方法 |
| JPS63134569A (ja) * | 1985-10-31 | 1988-06-07 | 京セラ株式会社 | 窒化アルミニウム焼結体 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60180965A (ja) * | 1983-11-18 | 1985-09-14 | ゼネラル・エレクトリツク・カンパニイ | 高熱伝導率の窒化アルミニウムセラミツク体とその製法 |
| JPS61146764A (ja) * | 1984-12-17 | 1986-07-04 | ティーディーケイ株式会社 | 窒化アルミニウム焼結体およびその製造方法 |
| JPS61183174A (ja) * | 1985-02-08 | 1986-08-15 | 株式会社東芝 | 窒化アルミニウム焼結体 |
-
1985
- 1985-03-01 JP JP60040755A patent/JPS61201669A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60180965A (ja) * | 1983-11-18 | 1985-09-14 | ゼネラル・エレクトリツク・カンパニイ | 高熱伝導率の窒化アルミニウムセラミツク体とその製法 |
| JPS61146764A (ja) * | 1984-12-17 | 1986-07-04 | ティーディーケイ株式会社 | 窒化アルミニウム焼結体およびその製造方法 |
| JPS61183174A (ja) * | 1985-02-08 | 1986-08-15 | 株式会社東芝 | 窒化アルミニウム焼結体 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61205670A (ja) * | 1985-03-07 | 1986-09-11 | 住友電気工業株式会社 | 窒化アルミニウム焼結体およびその製造方法 |
| JPS61209959A (ja) * | 1985-03-13 | 1986-09-18 | 株式会社東芝 | 窒化アルミニウム焼結体の製造方法 |
| JPS63134569A (ja) * | 1985-10-31 | 1988-06-07 | 京セラ株式会社 | 窒化アルミニウム焼結体 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH057349B2 (enExample) | 1993-01-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH01203270A (ja) | 高熱伝導性窒化アルミニウム焼結体及びその製造法 | |
| JPS6256109B2 (enExample) | ||
| JPS61201669A (ja) | 窒化アルミニウム焼結体及びその製造方法 | |
| JPH0717453B2 (ja) | 窒化アルミニウム質焼結体およびその製造方法 | |
| JPS61201668A (ja) | 高熱伝導窒化アルミニウム焼結体及びその製造方法 | |
| JPS6221764A (ja) | 窒化アルミニウム焼結体の製造方法 | |
| JPH06329474A (ja) | 窒化アルミニウム焼結体およびその製造方法 | |
| JPS61201670A (ja) | 窒化アルミニウム焼結体及びその製造方法 | |
| JPH02192467A (ja) | 窒化アルミニウム―六方晶窒化ほう素系焼結体の製造方法 | |
| JP2666942B2 (ja) | 窒化アルミニウム焼結体 | |
| JPS61146764A (ja) | 窒化アルミニウム焼結体およびその製造方法 | |
| JPH01252584A (ja) | 複合セラミックス焼結体およびその製造方法 | |
| JPS63218585A (ja) | 高熱伝導性窒化アルミニウム焼結体とその製造方法 | |
| JP2535139B2 (ja) | 放熱基板 | |
| JPH01111776A (ja) | 窒化アルミニウム焼結体の製造方法 | |
| JPH01179765A (ja) | 窒化アルミニウム焼結体およびその製造方法 | |
| JPS61286266A (ja) | 窒化アルミニウム焼結体の製造方法 | |
| JP2664063B2 (ja) | 窒化アルミニウム予備焼結体、窒化アルミニウム焼結体およびそれらの製造方法 | |
| JPS63206360A (ja) | 窒化アルミニウム焼結体の製造方法 | |
| JPH0684265B2 (ja) | 窒化アルミニウム焼結体 | |
| JPS62275069A (ja) | ＡｌＮ系セラミツクスの製造方法 | |
| JP2698014B2 (ja) | 窒化アルミニウム焼結体の製造方法 | |
| JPH0566905B2 (enExample) | ||
| JPS6252181A (ja) | 窒化アルミニウム焼結体の製造方法 | |
| JPS6236066A (ja) | 炭化珪素質焼結体およびその製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |