JPS6120032Y2 - - Google Patents
Info
- Publication number
- JPS6120032Y2 JPS6120032Y2 JP13998181U JP13998181U JPS6120032Y2 JP S6120032 Y2 JPS6120032 Y2 JP S6120032Y2 JP 13998181 U JP13998181 U JP 13998181U JP 13998181 U JP13998181 U JP 13998181U JP S6120032 Y2 JPS6120032 Y2 JP S6120032Y2
- Authority
- JP
- Japan
- Prior art keywords
- hearth
- liner
- evaporation
- hearth liner
- copper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001704 evaporation Methods 0.000 claims description 13
- 230000008020 evaporation Effects 0.000 claims description 13
- 238000007740 vapor deposition Methods 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
- 229910052802 copper Inorganic materials 0.000 description 9
- 239000010949 copper Substances 0.000 description 9
- 229910052582 BN Inorganic materials 0.000 description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 4
- 239000002131 composite material Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13998181U JPS5845363U (ja) | 1981-09-21 | 1981-09-21 | 蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13998181U JPS5845363U (ja) | 1981-09-21 | 1981-09-21 | 蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5845363U JPS5845363U (ja) | 1983-03-26 |
| JPS6120032Y2 true JPS6120032Y2 (US20100056889A1-20100304-C00004.png) | 1986-06-17 |
Family
ID=29933156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13998181U Granted JPS5845363U (ja) | 1981-09-21 | 1981-09-21 | 蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5845363U (US20100056889A1-20100304-C00004.png) |
-
1981
- 1981-09-21 JP JP13998181U patent/JPS5845363U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5845363U (ja) | 1983-03-26 |
