JPS61199661U - - Google Patents

Info

Publication number
JPS61199661U
JPS61199661U JP8336685U JP8336685U JPS61199661U JP S61199661 U JPS61199661 U JP S61199661U JP 8336685 U JP8336685 U JP 8336685U JP 8336685 U JP8336685 U JP 8336685U JP S61199661 U JPS61199661 U JP S61199661U
Authority
JP
Japan
Prior art keywords
screen
defect inspection
light
inspected
surface defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8336685U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0348525Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8336685U priority Critical patent/JPH0348525Y2/ja
Publication of JPS61199661U publication Critical patent/JPS61199661U/ja
Application granted granted Critical
Publication of JPH0348525Y2 publication Critical patent/JPH0348525Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP8336685U 1985-06-04 1985-06-04 Expired JPH0348525Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8336685U JPH0348525Y2 (enrdf_load_stackoverflow) 1985-06-04 1985-06-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8336685U JPH0348525Y2 (enrdf_load_stackoverflow) 1985-06-04 1985-06-04

Publications (2)

Publication Number Publication Date
JPS61199661U true JPS61199661U (enrdf_load_stackoverflow) 1986-12-13
JPH0348525Y2 JPH0348525Y2 (enrdf_load_stackoverflow) 1991-10-16

Family

ID=30631932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8336685U Expired JPH0348525Y2 (enrdf_load_stackoverflow) 1985-06-04 1985-06-04

Country Status (1)

Country Link
JP (1) JPH0348525Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107796829A (zh) * 2016-08-31 2018-03-13 株式会社理光 检查装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107796829A (zh) * 2016-08-31 2018-03-13 株式会社理光 检查装置
CN107796829B (zh) * 2016-08-31 2020-11-06 株式会社理光 检查装置

Also Published As

Publication number Publication date
JPH0348525Y2 (enrdf_load_stackoverflow) 1991-10-16

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