JPS61199644A - ワイヤボンディング装置 - Google Patents

ワイヤボンディング装置

Info

Publication number
JPS61199644A
JPS61199644A JP60040417A JP4041785A JPS61199644A JP S61199644 A JPS61199644 A JP S61199644A JP 60040417 A JP60040417 A JP 60040417A JP 4041785 A JP4041785 A JP 4041785A JP S61199644 A JPS61199644 A JP S61199644A
Authority
JP
Japan
Prior art keywords
wire
bonding
tension
vacuum
spacers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60040417A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0358536B2 (cg-RX-API-DMAC10.html
Inventor
Noriyuki Inagaki
典之 稲垣
Yutaka Makino
豊 牧野
Akihiro Yamamoto
章博 山本
Takeichi Yoshida
吉田 竹一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60040417A priority Critical patent/JPS61199644A/ja
Publication of JPS61199644A publication Critical patent/JPS61199644A/ja
Publication of JPH0358536B2 publication Critical patent/JPH0358536B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/0711
    • H10W72/07141
    • H10W72/07168
    • H10W72/075
    • H10W72/07502
    • H10W72/07551
    • H10W72/50
    • H10W72/536
    • H10W72/5363

Landscapes

  • Wire Bonding (AREA)
JP60040417A 1985-03-01 1985-03-01 ワイヤボンディング装置 Granted JPS61199644A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60040417A JPS61199644A (ja) 1985-03-01 1985-03-01 ワイヤボンディング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60040417A JPS61199644A (ja) 1985-03-01 1985-03-01 ワイヤボンディング装置

Publications (2)

Publication Number Publication Date
JPS61199644A true JPS61199644A (ja) 1986-09-04
JPH0358536B2 JPH0358536B2 (cg-RX-API-DMAC10.html) 1991-09-05

Family

ID=12580082

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60040417A Granted JPS61199644A (ja) 1985-03-01 1985-03-01 ワイヤボンディング装置

Country Status (1)

Country Link
JP (1) JPS61199644A (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4909431A (en) * 1988-05-18 1990-03-20 Emanuele Japichino Method and apparatus for preparing a bonding wire

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4909431A (en) * 1988-05-18 1990-03-20 Emanuele Japichino Method and apparatus for preparing a bonding wire

Also Published As

Publication number Publication date
JPH0358536B2 (cg-RX-API-DMAC10.html) 1991-09-05

Similar Documents

Publication Publication Date Title
CN101740427B (zh) 用于大导线键合机的键合头
JPS61199644A (ja) ワイヤボンディング装置
US3250452A (en) Nail head bonding apparatus for thermocompressively securing lead wire to semi-conductor devices
JP2969953B2 (ja) 半導体装置の製造方法及びその装置
JPH036841A (ja) ボンデイング装置及び方法
JP2767277B2 (ja) インナーリードボンダ
JPS6227740B2 (cg-RX-API-DMAC10.html)
KR102779648B1 (ko) 본딩 장치 및 위치 맞춤 방법
JPH0611066B2 (ja) ワイヤボンデイング装置
JPH011244A (ja) ワイヤボンディング装置
JPH0219968Y2 (cg-RX-API-DMAC10.html)
JPS59112630A (ja) ワイヤボンデイング装置
JPH06232132A (ja) バンプ形成装置
JPH0775241B2 (ja) ワイヤボンディング方法及びその装置
JPH0521502A (ja) ワイヤボンデイング装置
JP2925392B2 (ja) ボール式ワイヤボンディング方法
JPH10233429A (ja) 基板への粘着テープ貼付け装置
JPH0220833Y2 (cg-RX-API-DMAC10.html)
JPH08340026A (ja) ワイヤボンディング装置
JPS5924540B2 (ja) 超音波ワイヤボンデイング装置
JPH02133934A (ja) ワイヤクランプ機構
JP3223324B2 (ja) 半導体基板劈開方法及び装置
JP3369764B2 (ja) ワイヤボンディング装置における放電用トーチ電極体
JPH0793222B2 (ja) 磁気ヘッド用巻線機
JPS61199643A (ja) ワイヤボンダ