JPS61198782A - 電界効果型半導体装置 - Google Patents

電界効果型半導体装置

Info

Publication number
JPS61198782A
JPS61198782A JP60037431A JP3743185A JPS61198782A JP S61198782 A JPS61198782 A JP S61198782A JP 60037431 A JP60037431 A JP 60037431A JP 3743185 A JP3743185 A JP 3743185A JP S61198782 A JPS61198782 A JP S61198782A
Authority
JP
Japan
Prior art keywords
layer
type
electron
resistance semiconductor
spacer layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60037431A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0156541B2 (enrdf_load_stackoverflow
Inventor
Tomonori Ishikawa
石川　知則
Masahiko Sasa
佐々　誠彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP60037431A priority Critical patent/JPS61198782A/ja
Publication of JPS61198782A publication Critical patent/JPS61198782A/ja
Publication of JPH0156541B2 publication Critical patent/JPH0156541B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
    • H10D30/47—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having 2D charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
    • H10D30/471—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT]
    • H10D30/475—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs
    • H10D30/4755—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs having wide bandgap charge-carrier supplying layers, e.g. modulation doped HEMTs such as n-AlGaAs/GaAs HEMTs

Landscapes

  • Junction Field-Effect Transistors (AREA)
JP60037431A 1985-02-28 1985-02-28 電界効果型半導体装置 Granted JPS61198782A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60037431A JPS61198782A (ja) 1985-02-28 1985-02-28 電界効果型半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60037431A JPS61198782A (ja) 1985-02-28 1985-02-28 電界効果型半導体装置

Publications (2)

Publication Number Publication Date
JPS61198782A true JPS61198782A (ja) 1986-09-03
JPH0156541B2 JPH0156541B2 (enrdf_load_stackoverflow) 1989-11-30

Family

ID=12497323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60037431A Granted JPS61198782A (ja) 1985-02-28 1985-02-28 電界効果型半導体装置

Country Status (1)

Country Link
JP (1) JPS61198782A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0156541B2 (enrdf_load_stackoverflow) 1989-11-30

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term