JPS61197638A - プラズマ処理装置及び方法 - Google Patents

プラズマ処理装置及び方法

Info

Publication number
JPS61197638A
JPS61197638A JP60037463A JP3746385A JPS61197638A JP S61197638 A JPS61197638 A JP S61197638A JP 60037463 A JP60037463 A JP 60037463A JP 3746385 A JP3746385 A JP 3746385A JP S61197638 A JPS61197638 A JP S61197638A
Authority
JP
Japan
Prior art keywords
electrode
plastic tube
side electrode
insulating layer
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60037463A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0576759B2 (OSRAM
Inventor
Masahiro Takeuchi
正浩 竹内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd
Priority to JP60037463A priority Critical patent/JPS61197638A/ja
Publication of JPS61197638A publication Critical patent/JPS61197638A/ja
Publication of JPH0576759B2 publication Critical patent/JPH0576759B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma Technology (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP60037463A 1985-02-28 1985-02-28 プラズマ処理装置及び方法 Granted JPS61197638A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60037463A JPS61197638A (ja) 1985-02-28 1985-02-28 プラズマ処理装置及び方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60037463A JPS61197638A (ja) 1985-02-28 1985-02-28 プラズマ処理装置及び方法

Publications (2)

Publication Number Publication Date
JPS61197638A true JPS61197638A (ja) 1986-09-01
JPH0576759B2 JPH0576759B2 (OSRAM) 1993-10-25

Family

ID=12498216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60037463A Granted JPS61197638A (ja) 1985-02-28 1985-02-28 プラズマ処理装置及び方法

Country Status (1)

Country Link
JP (1) JPS61197638A (OSRAM)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01296600A (ja) * 1988-05-23 1989-11-29 Nissin Electric Co Ltd プラズマ発生源
WO1999036586A1 (en) * 1998-01-15 1999-07-22 Torrex Equipment Corporation Apparatus and method for plasma enhanced chemical vapor deposition (pecvd) in a single wafer reactor
US6352593B1 (en) 1997-08-11 2002-03-05 Torrex Equipment Corp. Mini-batch process chamber
US6352594B2 (en) 1997-08-11 2002-03-05 Torrex Method and apparatus for improved chemical vapor deposition processes using tunable temperature controlled gas injectors
US6780464B2 (en) 1997-08-11 2004-08-24 Torrex Equipment Thermal gradient enhanced CVD deposition at low pressure
US7393561B2 (en) 1997-08-11 2008-07-01 Applied Materials, Inc. Method and apparatus for layer by layer deposition of thin films
JP2019077104A (ja) * 2017-10-25 2019-05-23 泉工業株式会社 チューブの表面処理装置及びプラズマ処理装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01296600A (ja) * 1988-05-23 1989-11-29 Nissin Electric Co Ltd プラズマ発生源
US6352593B1 (en) 1997-08-11 2002-03-05 Torrex Equipment Corp. Mini-batch process chamber
US6352594B2 (en) 1997-08-11 2002-03-05 Torrex Method and apparatus for improved chemical vapor deposition processes using tunable temperature controlled gas injectors
US6780464B2 (en) 1997-08-11 2004-08-24 Torrex Equipment Thermal gradient enhanced CVD deposition at low pressure
US7393561B2 (en) 1997-08-11 2008-07-01 Applied Materials, Inc. Method and apparatus for layer by layer deposition of thin films
WO1999036586A1 (en) * 1998-01-15 1999-07-22 Torrex Equipment Corporation Apparatus and method for plasma enhanced chemical vapor deposition (pecvd) in a single wafer reactor
US6167837B1 (en) 1998-01-15 2001-01-02 Torrex Equipment Corp. Apparatus and method for plasma enhanced chemical vapor deposition (PECVD) in a single wafer reactor
JP2019077104A (ja) * 2017-10-25 2019-05-23 泉工業株式会社 チューブの表面処理装置及びプラズマ処理装置

Also Published As

Publication number Publication date
JPH0576759B2 (OSRAM) 1993-10-25

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