JPH0576759B2 - - Google Patents
Info
- Publication number
- JPH0576759B2 JPH0576759B2 JP60037463A JP3746385A JPH0576759B2 JP H0576759 B2 JPH0576759 B2 JP H0576759B2 JP 60037463 A JP60037463 A JP 60037463A JP 3746385 A JP3746385 A JP 3746385A JP H0576759 B2 JPH0576759 B2 JP H0576759B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- plastic tube
- side electrode
- voltage application
- hollow truncated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004033 plastic Substances 0.000 claims description 41
- 229920003023 plastic Polymers 0.000 claims description 41
- 238000000034 method Methods 0.000 claims description 16
- 230000005684 electric field Effects 0.000 claims description 2
- 208000028659 discharge Diseases 0.000 description 24
- 239000007789 gas Substances 0.000 description 13
- 238000009832 plasma treatment Methods 0.000 description 5
- 238000001816 cooling Methods 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000004695 Polyether sulfone Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 229920006393 polyether sulfone Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000002785 anti-thrombosis Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma Technology (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60037463A JPS61197638A (ja) | 1985-02-28 | 1985-02-28 | プラズマ処理装置及び方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60037463A JPS61197638A (ja) | 1985-02-28 | 1985-02-28 | プラズマ処理装置及び方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61197638A JPS61197638A (ja) | 1986-09-01 |
| JPH0576759B2 true JPH0576759B2 (OSRAM) | 1993-10-25 |
Family
ID=12498216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60037463A Granted JPS61197638A (ja) | 1985-02-28 | 1985-02-28 | プラズマ処理装置及び方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61197638A (OSRAM) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01296600A (ja) * | 1988-05-23 | 1989-11-29 | Nissin Electric Co Ltd | プラズマ発生源 |
| US7393561B2 (en) | 1997-08-11 | 2008-07-01 | Applied Materials, Inc. | Method and apparatus for layer by layer deposition of thin films |
| US6352593B1 (en) | 1997-08-11 | 2002-03-05 | Torrex Equipment Corp. | Mini-batch process chamber |
| US6167837B1 (en) * | 1998-01-15 | 2001-01-02 | Torrex Equipment Corp. | Apparatus and method for plasma enhanced chemical vapor deposition (PECVD) in a single wafer reactor |
| US6352594B2 (en) | 1997-08-11 | 2002-03-05 | Torrex | Method and apparatus for improved chemical vapor deposition processes using tunable temperature controlled gas injectors |
| US6780464B2 (en) | 1997-08-11 | 2004-08-24 | Torrex Equipment | Thermal gradient enhanced CVD deposition at low pressure |
| JP7001258B2 (ja) * | 2017-10-25 | 2022-01-19 | 泉工業株式会社 | チューブの表面処理装置及びプラズマ処理装置 |
-
1985
- 1985-02-28 JP JP60037463A patent/JPS61197638A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61197638A (ja) | 1986-09-01 |
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