JPS6119560A - 研摩定盤装置 - Google Patents

研摩定盤装置

Info

Publication number
JPS6119560A
JPS6119560A JP59139874A JP13987484A JPS6119560A JP S6119560 A JPS6119560 A JP S6119560A JP 59139874 A JP59139874 A JP 59139874A JP 13987484 A JP13987484 A JP 13987484A JP S6119560 A JPS6119560 A JP S6119560A
Authority
JP
Japan
Prior art keywords
polishing surface
surface plate
grooves
abrasive grains
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59139874A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0375306B2 (enExample
Inventor
Kunihiko Ikuno
生野　邦彦
Tsutomu Moriwaki
森脇　力
Yoshiro Maki
牧　芳郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59139874A priority Critical patent/JPS6119560A/ja
Publication of JPS6119560A publication Critical patent/JPS6119560A/ja
Publication of JPH0375306B2 publication Critical patent/JPH0375306B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP59139874A 1984-07-05 1984-07-05 研摩定盤装置 Granted JPS6119560A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59139874A JPS6119560A (ja) 1984-07-05 1984-07-05 研摩定盤装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59139874A JPS6119560A (ja) 1984-07-05 1984-07-05 研摩定盤装置

Publications (2)

Publication Number Publication Date
JPS6119560A true JPS6119560A (ja) 1986-01-28
JPH0375306B2 JPH0375306B2 (enExample) 1991-11-29

Family

ID=15255571

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59139874A Granted JPS6119560A (ja) 1984-07-05 1984-07-05 研摩定盤装置

Country Status (1)

Country Link
JP (1) JPS6119560A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6321557U (enExample) * 1986-07-29 1988-02-12
US6749714B1 (en) 1999-03-30 2004-06-15 Nikon Corporation Polishing body, polisher, polishing method, and method for producing semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60142063U (ja) * 1984-02-28 1985-09-20 関西日本電気株式会社 研削装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60142063U (ja) * 1984-02-28 1985-09-20 関西日本電気株式会社 研削装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6321557U (enExample) * 1986-07-29 1988-02-12
US6749714B1 (en) 1999-03-30 2004-06-15 Nikon Corporation Polishing body, polisher, polishing method, and method for producing semiconductor device

Also Published As

Publication number Publication date
JPH0375306B2 (enExample) 1991-11-29

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term