JPS61194360A - 三塩化ホウ素吸着装置の破過検知方法 - Google Patents

三塩化ホウ素吸着装置の破過検知方法

Info

Publication number
JPS61194360A
JPS61194360A JP60035065A JP3506585A JPS61194360A JP S61194360 A JPS61194360 A JP S61194360A JP 60035065 A JP60035065 A JP 60035065A JP 3506585 A JP3506585 A JP 3506585A JP S61194360 A JPS61194360 A JP S61194360A
Authority
JP
Japan
Prior art keywords
gas
boron trichloride
carrier
adsorption device
detection agent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60035065A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0583867B2 (enExample
Inventor
Masao Miura
正男 三浦
Mamoru Miyamoto
守 宮本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ube Corp
Original Assignee
Ube Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ube Industries Ltd filed Critical Ube Industries Ltd
Priority to JP60035065A priority Critical patent/JPS61194360A/ja
Publication of JPS61194360A publication Critical patent/JPS61194360A/ja
Priority to US07/082,932 priority patent/US4820316A/en
Publication of JPH0583867B2 publication Critical patent/JPH0583867B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Treating Waste Gases (AREA)
JP60035065A 1984-09-11 1985-02-22 三塩化ホウ素吸着装置の破過検知方法 Granted JPS61194360A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60035065A JPS61194360A (ja) 1985-02-22 1985-02-22 三塩化ホウ素吸着装置の破過検知方法
US07/082,932 US4820316A (en) 1984-09-11 1987-08-05 Method of foreseeing break-through in gas adsorbing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60035065A JPS61194360A (ja) 1985-02-22 1985-02-22 三塩化ホウ素吸着装置の破過検知方法

Publications (2)

Publication Number Publication Date
JPS61194360A true JPS61194360A (ja) 1986-08-28
JPH0583867B2 JPH0583867B2 (enExample) 1993-11-29

Family

ID=12431616

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60035065A Granted JPS61194360A (ja) 1984-09-11 1985-02-22 三塩化ホウ素吸着装置の破過検知方法

Country Status (1)

Country Link
JP (1) JPS61194360A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH037930U (enExample) * 1989-06-08 1991-01-25

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07186575A (ja) * 1993-12-27 1995-07-25 Nec Corp コイル式ｉｄカード
JPH08895U (ja) * 1995-11-29 1996-05-31 株式会社七星科学研究所 非接触情報識別カード装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH037930U (enExample) * 1989-06-08 1991-01-25

Also Published As

Publication number Publication date
JPH0583867B2 (enExample) 1993-11-29

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