JPS6117279Y2 - - Google Patents
Info
- Publication number
- JPS6117279Y2 JPS6117279Y2 JP14919177U JP14919177U JPS6117279Y2 JP S6117279 Y2 JPS6117279 Y2 JP S6117279Y2 JP 14919177 U JP14919177 U JP 14919177U JP 14919177 U JP14919177 U JP 14919177U JP S6117279 Y2 JPS6117279 Y2 JP S6117279Y2
- Authority
- JP
- Japan
- Prior art keywords
- oil
- trap
- pump
- diffusion pump
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000009792 diffusion process Methods 0.000 claims description 28
- 239000007789 gas Substances 0.000 description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
- 230000006866 deterioration Effects 0.000 description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 108010063955 thrombin receptor peptide (42-47) Proteins 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000011946 reduction process Methods 0.000 description 2
- 230000001112 coagulating effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14919177U JPS6117279Y2 (enrdf_load_stackoverflow) | 1977-11-07 | 1977-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14919177U JPS6117279Y2 (enrdf_load_stackoverflow) | 1977-11-07 | 1977-11-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5474309U JPS5474309U (enrdf_load_stackoverflow) | 1979-05-26 |
| JPS6117279Y2 true JPS6117279Y2 (enrdf_load_stackoverflow) | 1986-05-27 |
Family
ID=29132287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14919177U Expired JPS6117279Y2 (enrdf_load_stackoverflow) | 1977-11-07 | 1977-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6117279Y2 (enrdf_load_stackoverflow) |
-
1977
- 1977-11-07 JP JP14919177U patent/JPS6117279Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5474309U (enrdf_load_stackoverflow) | 1979-05-26 |
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