JPS6117124B2 - - Google Patents
Info
- Publication number
- JPS6117124B2 JPS6117124B2 JP56166548A JP16654881A JPS6117124B2 JP S6117124 B2 JPS6117124 B2 JP S6117124B2 JP 56166548 A JP56166548 A JP 56166548A JP 16654881 A JP16654881 A JP 16654881A JP S6117124 B2 JPS6117124 B2 JP S6117124B2
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- voltage
- resistance
- tablet
- pen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000523 sample Substances 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 21
- 238000009966 trimming Methods 0.000 claims description 18
- 239000002184 metal Substances 0.000 claims description 15
- 238000005259 measurement Methods 0.000 claims description 11
- 239000010409 thin film Substances 0.000 claims description 11
- 230000008859 change Effects 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000012886 linear function Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012417 linear regression Methods 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
- H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
- H01C17/2408—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by pulsed voltage erosion, e.g. spark erosion
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US22169580A | 1980-12-31 | 1980-12-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57121201A JPS57121201A (en) | 1982-07-28 |
JPS6117124B2 true JPS6117124B2 (enrdf_load_stackoverflow) | 1986-05-06 |
Family
ID=22828942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56166548A Granted JPS57121201A (en) | 1980-12-31 | 1981-10-20 | Method of trimming metal thin film resistor |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0055331B1 (enrdf_load_stackoverflow) |
JP (1) | JPS57121201A (enrdf_load_stackoverflow) |
DE (1) | DE3170519D1 (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2519776B2 (ja) * | 1988-06-17 | 1996-07-31 | 富士通株式会社 | 透明電導シ―ト抵抗評価方法及びその装置 |
KR100971220B1 (ko) * | 2009-08-17 | 2010-07-20 | 주식회사 에프티랩 | Lc공진주파수 변이를 이용한 정전용량방식 터치스크린패널의 검사방법 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1149775A (en) * | 1966-09-21 | 1969-04-23 | Associated Semiconductor Mft | Thin film resistors |
DE2344504A1 (de) * | 1973-09-04 | 1975-03-13 | Siemens Ag | Verfahren zum abgleichen von elektrischen duennschichtwiderstaenden |
US4087625A (en) * | 1976-12-29 | 1978-05-02 | International Business Machines Corporation | Capacitive two dimensional tablet with single conductive layer |
FR2376399A1 (fr) * | 1977-11-18 | 1978-07-28 | Ibm | Tablette capacitive a une seule couche conductrice |
-
1981
- 1981-09-23 DE DE8181107584T patent/DE3170519D1/de not_active Expired
- 1981-09-23 EP EP19810107584 patent/EP0055331B1/en not_active Expired
- 1981-10-20 JP JP56166548A patent/JPS57121201A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
EP0055331A3 (en) | 1983-05-18 |
DE3170519D1 (en) | 1985-06-20 |
EP0055331B1 (en) | 1985-05-15 |
JPS57121201A (en) | 1982-07-28 |
EP0055331A2 (en) | 1982-07-07 |
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