JPS57121201A - Method of trimming metal thin film resistor - Google Patents
Method of trimming metal thin film resistorInfo
- Publication number
- JPS57121201A JPS57121201A JP56166548A JP16654881A JPS57121201A JP S57121201 A JPS57121201 A JP S57121201A JP 56166548 A JP56166548 A JP 56166548A JP 16654881 A JP16654881 A JP 16654881A JP S57121201 A JPS57121201 A JP S57121201A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- metal thin
- film resistor
- trimming metal
- trimming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
- H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
- H01C17/2408—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by pulsed voltage erosion, e.g. spark erosion
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US22169580A | 1980-12-31 | 1980-12-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57121201A true JPS57121201A (en) | 1982-07-28 |
JPS6117124B2 JPS6117124B2 (ja) | 1986-05-06 |
Family
ID=22828942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56166548A Granted JPS57121201A (en) | 1980-12-31 | 1981-10-20 | Method of trimming metal thin film resistor |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0055331B1 (ja) |
JP (1) | JPS57121201A (ja) |
DE (1) | DE3170519D1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01318973A (ja) * | 1988-06-17 | 1989-12-25 | Fujitsu Ltd | 透明電導シート抵抗評価方法及びその装置 |
JP2011527440A (ja) * | 2009-08-17 | 2011-10-27 | エフティーラブ・カンパニー・リミテッド | Lc共振周波数シフトを用いた静電容量方式タッチスクリーンパネルの検査装置および検査方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1149775A (en) * | 1966-09-21 | 1969-04-23 | Associated Semiconductor Mft | Thin film resistors |
DE2344504A1 (de) * | 1973-09-04 | 1975-03-13 | Siemens Ag | Verfahren zum abgleichen von elektrischen duennschichtwiderstaenden |
US4087625A (en) * | 1976-12-29 | 1978-05-02 | International Business Machines Corporation | Capacitive two dimensional tablet with single conductive layer |
FR2376399A1 (fr) * | 1977-11-18 | 1978-07-28 | Ibm | Tablette capacitive a une seule couche conductrice |
-
1981
- 1981-09-23 DE DE8181107584T patent/DE3170519D1/de not_active Expired
- 1981-09-23 EP EP19810107584 patent/EP0055331B1/en not_active Expired
- 1981-10-20 JP JP56166548A patent/JPS57121201A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01318973A (ja) * | 1988-06-17 | 1989-12-25 | Fujitsu Ltd | 透明電導シート抵抗評価方法及びその装置 |
JP2011527440A (ja) * | 2009-08-17 | 2011-10-27 | エフティーラブ・カンパニー・リミテッド | Lc共振周波数シフトを用いた静電容量方式タッチスクリーンパネルの検査装置および検査方法 |
Also Published As
Publication number | Publication date |
---|---|
EP0055331A2 (en) | 1982-07-07 |
EP0055331A3 (en) | 1983-05-18 |
EP0055331B1 (en) | 1985-05-15 |
JPS6117124B2 (ja) | 1986-05-06 |
DE3170519D1 (en) | 1985-06-20 |
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