DE3170519D1 - Method of trimming thin metal resistors - Google Patents

Method of trimming thin metal resistors

Info

Publication number
DE3170519D1
DE3170519D1 DE8181107584T DE3170519T DE3170519D1 DE 3170519 D1 DE3170519 D1 DE 3170519D1 DE 8181107584 T DE8181107584 T DE 8181107584T DE 3170519 T DE3170519 T DE 3170519T DE 3170519 D1 DE3170519 D1 DE 3170519D1
Authority
DE
Germany
Prior art keywords
thin metal
metal resistors
trimming thin
trimming
resistors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8181107584T
Other languages
German (de)
Inventor
Joseph Francis Hevesi
Stanley Frank Kambic
Joseph Bruno Kluepfel
Frank John Schmidt
Duynhoven Thomas Jerome Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3170519D1 publication Critical patent/DE3170519D1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
    • H01C17/2408—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by pulsed voltage erosion, e.g. spark erosion

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
DE8181107584T 1980-12-31 1981-09-23 Method of trimming thin metal resistors Expired DE3170519D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US22169580A 1980-12-31 1980-12-31

Publications (1)

Publication Number Publication Date
DE3170519D1 true DE3170519D1 (en) 1985-06-20

Family

ID=22828942

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8181107584T Expired DE3170519D1 (en) 1980-12-31 1981-09-23 Method of trimming thin metal resistors

Country Status (3)

Country Link
EP (1) EP0055331B1 (en)
JP (1) JPS57121201A (en)
DE (1) DE3170519D1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2519776B2 (en) * 1988-06-17 1996-07-31 富士通株式会社 Method and apparatus for evaluating transparent conductive sheet resistance
KR100971220B1 (en) * 2009-08-17 2010-07-20 주식회사 에프티랩 The inspection method of the capacitive touch screen panel using lc resonance frequency shift

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1149775A (en) * 1966-09-21 1969-04-23 Associated Semiconductor Mft Thin film resistors
DE2344504A1 (en) * 1973-09-04 1975-03-13 Siemens Ag Dynamic matching device for thin-film resistors - has HF electrode supplied via HV capacitor and arc-trimming resistance layer
US4087625A (en) * 1976-12-29 1978-05-02 International Business Machines Corporation Capacitive two dimensional tablet with single conductive layer
FR2376399A1 (en) * 1977-11-18 1978-07-28 Ibm Flat plate capacitor construction - has pairs of complementary electrodes defining network of parallel lines of equipotential on surface of support substrate

Also Published As

Publication number Publication date
EP0055331A2 (en) 1982-07-07
EP0055331A3 (en) 1983-05-18
EP0055331B1 (en) 1985-05-15
JPS57121201A (en) 1982-07-28
JPS6117124B2 (en) 1986-05-06

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee