JPS6116732B2 - - Google Patents
Info
- Publication number
- JPS6116732B2 JPS6116732B2 JP12472479A JP12472479A JPS6116732B2 JP S6116732 B2 JPS6116732 B2 JP S6116732B2 JP 12472479 A JP12472479 A JP 12472479A JP 12472479 A JP12472479 A JP 12472479A JP S6116732 B2 JPS6116732 B2 JP S6116732B2
- Authority
- JP
- Japan
- Prior art keywords
- silicic acid
- fine powder
- particle size
- acid
- sio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 claims description 28
- 235000012239 silicon dioxide Nutrition 0.000 claims description 28
- 239000002245 particle Substances 0.000 claims description 16
- 239000000843 powder Substances 0.000 claims description 14
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 230000002378 acidificating effect Effects 0.000 claims description 2
- 229910052708 sodium Inorganic materials 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims 1
- 239000011734 sodium Substances 0.000 description 10
- 239000004115 Sodium Silicate Substances 0.000 description 8
- 239000002253 acid Substances 0.000 description 8
- 229910052911 sodium silicate Inorganic materials 0.000 description 8
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 239000007864 aqueous solution Substances 0.000 description 6
- 150000003839 salts Chemical class 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 229910052910 alkali metal silicate Inorganic materials 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 229910004283 SiO 4 Inorganic materials 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910002012 Aerosil® Inorganic materials 0.000 description 1
- 239000004111 Potassium silicate Substances 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052913 potassium silicate Inorganic materials 0.000 description 1
- NNHHDJVEYQHLHG-UHFFFAOYSA-N potassium silicate Chemical compound [K+].[K+].[O-][Si]([O-])=O NNHHDJVEYQHLHG-UHFFFAOYSA-N 0.000 description 1
- 235000019353 potassium silicate Nutrition 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000005070 ripening Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12472479A JPS5650110A (en) | 1979-09-29 | 1979-09-29 | Manufacture of finely powdered silicic acid of larger particle size |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12472479A JPS5650110A (en) | 1979-09-29 | 1979-09-29 | Manufacture of finely powdered silicic acid of larger particle size |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5650110A JPS5650110A (en) | 1981-05-07 |
| JPS6116732B2 true JPS6116732B2 (de) | 1986-05-01 |
Family
ID=14892529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12472479A Granted JPS5650110A (en) | 1979-09-29 | 1979-09-29 | Manufacture of finely powdered silicic acid of larger particle size |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5650110A (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58111342U (ja) * | 1982-01-22 | 1983-07-29 | 本田技研工業株式会社 | 気化器の調整ネジ |
-
1979
- 1979-09-29 JP JP12472479A patent/JPS5650110A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5650110A (en) | 1981-05-07 |
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