JPS61163273A - 被覆硬質部材 - Google Patents
被覆硬質部材Info
- Publication number
- JPS61163273A JPS61163273A JP448585A JP448585A JPS61163273A JP S61163273 A JPS61163273 A JP S61163273A JP 448585 A JP448585 A JP 448585A JP 448585 A JP448585 A JP 448585A JP S61163273 A JPS61163273 A JP S61163273A
- Authority
- JP
- Japan
- Prior art keywords
- diamond
- film
- coated hard
- coated
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010432 diamond Substances 0.000 claims abstract description 45
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 42
- 239000000758 substrate Substances 0.000 claims abstract description 6
- 239000011247 coating layer Substances 0.000 claims 3
- 239000010410 layer Substances 0.000 claims 2
- 239000012535 impurity Substances 0.000 abstract description 15
- 238000005520 cutting process Methods 0.000 abstract description 11
- 238000000034 method Methods 0.000 abstract description 9
- 239000011248 coating agent Substances 0.000 abstract description 8
- 238000000576 coating method Methods 0.000 abstract description 8
- 238000005268 plasma chemical vapour deposition Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 18
- 239000007789 gas Substances 0.000 description 7
- 229910000997 High-speed steel Inorganic materials 0.000 description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 239000012808 vapor phase Substances 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 238000001308 synthesis method Methods 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- -1 etc. Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000007737 ion beam deposition Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Laminated Bodies (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP448585A JPS61163273A (ja) | 1985-01-14 | 1985-01-14 | 被覆硬質部材 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP448585A JPS61163273A (ja) | 1985-01-14 | 1985-01-14 | 被覆硬質部材 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61163273A true JPS61163273A (ja) | 1986-07-23 |
| JPH059512B2 JPH059512B2 (https=) | 1993-02-05 |
Family
ID=11585395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP448585A Granted JPS61163273A (ja) | 1985-01-14 | 1985-01-14 | 被覆硬質部材 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61163273A (https=) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62157602A (ja) * | 1985-04-18 | 1987-07-13 | 鐘淵化学工業株式会社 | 硬質カ−ボン膜 |
| WO1991014572A1 (en) * | 1990-03-20 | 1991-10-03 | Diamonex, Incorporated | Diamond-on-a-substrate for electronic applications |
| US5266409A (en) * | 1989-04-28 | 1993-11-30 | Digital Equipment Corporation | Hydrogenated carbon compositions |
| US5318836A (en) * | 1989-06-15 | 1994-06-07 | Ngk Spark Plug Company Limited | Diamond-coated body |
| US5334453A (en) * | 1989-12-28 | 1994-08-02 | Ngk Spark Plug Company Limited | Diamond-coated bodies and process for preparation thereof |
| US5478513A (en) * | 1991-12-13 | 1995-12-26 | General Electric Company | CVD diamond growth on hydride-forming metal substrates |
| US5491002A (en) * | 1992-03-20 | 1996-02-13 | General Electric Company | Multilayer CVD diamond films |
| US5750422A (en) * | 1992-10-02 | 1998-05-12 | Hewlett-Packard Company | Method for making integrated circuit packaging with reinforced leads |
| US5939140A (en) * | 1994-06-13 | 1999-08-17 | Sumitomo Electric Industries, Ltd. | Hot filament CVD of diamond films |
| US6183843B1 (en) * | 1991-12-06 | 2001-02-06 | Raytheon Company | Method for producing low reflectance diamond and products therefor |
-
1985
- 1985-01-14 JP JP448585A patent/JPS61163273A/ja active Granted
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62157602A (ja) * | 1985-04-18 | 1987-07-13 | 鐘淵化学工業株式会社 | 硬質カ−ボン膜 |
| US5266409A (en) * | 1989-04-28 | 1993-11-30 | Digital Equipment Corporation | Hydrogenated carbon compositions |
| US5750210A (en) * | 1989-04-28 | 1998-05-12 | Case Western Reserve University | Hydrogenated carbon composition |
| US5318836A (en) * | 1989-06-15 | 1994-06-07 | Ngk Spark Plug Company Limited | Diamond-coated body |
| US5334453A (en) * | 1989-12-28 | 1994-08-02 | Ngk Spark Plug Company Limited | Diamond-coated bodies and process for preparation thereof |
| WO1991014572A1 (en) * | 1990-03-20 | 1991-10-03 | Diamonex, Incorporated | Diamond-on-a-substrate for electronic applications |
| US6183843B1 (en) * | 1991-12-06 | 2001-02-06 | Raytheon Company | Method for producing low reflectance diamond and products therefor |
| US5478513A (en) * | 1991-12-13 | 1995-12-26 | General Electric Company | CVD diamond growth on hydride-forming metal substrates |
| US5491002A (en) * | 1992-03-20 | 1996-02-13 | General Electric Company | Multilayer CVD diamond films |
| US5750422A (en) * | 1992-10-02 | 1998-05-12 | Hewlett-Packard Company | Method for making integrated circuit packaging with reinforced leads |
| US5939140A (en) * | 1994-06-13 | 1999-08-17 | Sumitomo Electric Industries, Ltd. | Hot filament CVD of diamond films |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH059512B2 (https=) | 1993-02-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |