JPS61162936U - - Google Patents
Info
- Publication number
- JPS61162936U JPS61162936U JP4622185U JP4622185U JPS61162936U JP S61162936 U JPS61162936 U JP S61162936U JP 4622185 U JP4622185 U JP 4622185U JP 4622185 U JP4622185 U JP 4622185U JP S61162936 U JPS61162936 U JP S61162936U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron beam
- scanning
- insulating
- neutralizes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4622185U JPS61162936U (de) | 1985-03-29 | 1985-03-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4622185U JPS61162936U (de) | 1985-03-29 | 1985-03-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61162936U true JPS61162936U (de) | 1986-10-08 |
Family
ID=30560423
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4622185U Pending JPS61162936U (de) | 1985-03-29 | 1985-03-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61162936U (de) |
-
1985
- 1985-03-29 JP JP4622185U patent/JPS61162936U/ja active Pending
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