JPS61160970A - 固体撮像装置の製造方法 - Google Patents

固体撮像装置の製造方法

Info

Publication number
JPS61160970A
JPS61160970A JP60001070A JP107085A JPS61160970A JP S61160970 A JPS61160970 A JP S61160970A JP 60001070 A JP60001070 A JP 60001070A JP 107085 A JP107085 A JP 107085A JP S61160970 A JPS61160970 A JP S61160970A
Authority
JP
Japan
Prior art keywords
region
type
conductivity type
type region
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60001070A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0571143B2 (enrdf_load_stackoverflow
Inventor
Masaru Yoshino
吉野　優
Onori Ishikawa
石河　大典
Tadanaka Yoneda
米田　忠央
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60001070A priority Critical patent/JPS61160970A/ja
Publication of JPS61160970A publication Critical patent/JPS61160970A/ja
Publication of JPH0571143B2 publication Critical patent/JPH0571143B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/191—Photoconductor image sensors

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP60001070A 1985-01-08 1985-01-08 固体撮像装置の製造方法 Granted JPS61160970A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60001070A JPS61160970A (ja) 1985-01-08 1985-01-08 固体撮像装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60001070A JPS61160970A (ja) 1985-01-08 1985-01-08 固体撮像装置の製造方法

Publications (2)

Publication Number Publication Date
JPS61160970A true JPS61160970A (ja) 1986-07-21
JPH0571143B2 JPH0571143B2 (enrdf_load_stackoverflow) 1993-10-06

Family

ID=11491260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60001070A Granted JPS61160970A (ja) 1985-01-08 1985-01-08 固体撮像装置の製造方法

Country Status (1)

Country Link
JP (1) JPS61160970A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0571143B2 (enrdf_load_stackoverflow) 1993-10-06

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Legal Events

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