JPS61156804A - 薄膜形成方法 - Google Patents

薄膜形成方法

Info

Publication number
JPS61156804A
JPS61156804A JP59276358A JP27635884A JPS61156804A JP S61156804 A JPS61156804 A JP S61156804A JP 59276358 A JP59276358 A JP 59276358A JP 27635884 A JP27635884 A JP 27635884A JP S61156804 A JPS61156804 A JP S61156804A
Authority
JP
Japan
Prior art keywords
substrate
thin film
film
insulating film
magnetic thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59276358A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0255923B2 (OSRAM
Inventor
Kiyoshi Ozaki
喜義 尾崎
Mikio Segawa
幹雄 瀬川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP59276358A priority Critical patent/JPS61156804A/ja
Publication of JPS61156804A publication Critical patent/JPS61156804A/ja
Publication of JPH0255923B2 publication Critical patent/JPH0255923B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP59276358A 1984-12-28 1984-12-28 薄膜形成方法 Granted JPS61156804A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59276358A JPS61156804A (ja) 1984-12-28 1984-12-28 薄膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59276358A JPS61156804A (ja) 1984-12-28 1984-12-28 薄膜形成方法

Publications (2)

Publication Number Publication Date
JPS61156804A true JPS61156804A (ja) 1986-07-16
JPH0255923B2 JPH0255923B2 (OSRAM) 1990-11-28

Family

ID=17568314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59276358A Granted JPS61156804A (ja) 1984-12-28 1984-12-28 薄膜形成方法

Country Status (1)

Country Link
JP (1) JPS61156804A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01147060A (ja) * 1987-12-04 1989-06-08 Hitachi Ltd スパッタリング装置
JPH01184276A (ja) * 1988-01-20 1989-07-21 Hitachi Ltd スパッタによる成膜方法及びその装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01147060A (ja) * 1987-12-04 1989-06-08 Hitachi Ltd スパッタリング装置
JPH01184276A (ja) * 1988-01-20 1989-07-21 Hitachi Ltd スパッタによる成膜方法及びその装置

Also Published As

Publication number Publication date
JPH0255923B2 (OSRAM) 1990-11-28

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