JPH0255923B2 - - Google Patents

Info

Publication number
JPH0255923B2
JPH0255923B2 JP59276358A JP27635884A JPH0255923B2 JP H0255923 B2 JPH0255923 B2 JP H0255923B2 JP 59276358 A JP59276358 A JP 59276358A JP 27635884 A JP27635884 A JP 27635884A JP H0255923 B2 JPH0255923 B2 JP H0255923B2
Authority
JP
Japan
Prior art keywords
substrate
thin film
insulating film
electrode
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59276358A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61156804A (ja
Inventor
Kyoshi Ozaki
Mikio Segawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP59276358A priority Critical patent/JPS61156804A/ja
Publication of JPS61156804A publication Critical patent/JPS61156804A/ja
Publication of JPH0255923B2 publication Critical patent/JPH0255923B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP59276358A 1984-12-28 1984-12-28 薄膜形成方法 Granted JPS61156804A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59276358A JPS61156804A (ja) 1984-12-28 1984-12-28 薄膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59276358A JPS61156804A (ja) 1984-12-28 1984-12-28 薄膜形成方法

Publications (2)

Publication Number Publication Date
JPS61156804A JPS61156804A (ja) 1986-07-16
JPH0255923B2 true JPH0255923B2 (OSRAM) 1990-11-28

Family

ID=17568314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59276358A Granted JPS61156804A (ja) 1984-12-28 1984-12-28 薄膜形成方法

Country Status (1)

Country Link
JP (1) JPS61156804A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0699804B2 (ja) * 1987-12-04 1994-12-07 株式会社日立製作所 スパッタリング装置
JP2607582B2 (ja) * 1988-01-20 1997-05-07 株式会社日立製作所 スパッタによる成膜方法及びその装置

Also Published As

Publication number Publication date
JPS61156804A (ja) 1986-07-16

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