JPS61155982A - Ｘ線透過膜の蒸着方法 - Google Patents

Ｘ線透過膜の蒸着方法

Info

Publication number
JPS61155982A
JPS61155982A JP27893784A JP27893784A JPS61155982A JP S61155982 A JPS61155982 A JP S61155982A JP 27893784 A JP27893784 A JP 27893784A JP 27893784 A JP27893784 A JP 27893784A JP S61155982 A JPS61155982 A JP S61155982A
Authority
JP
Japan
Prior art keywords
film
thin film
vacuum
ray
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27893784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0478154B2 (https=
Inventor
Yoshio Makita
蒔田　吉生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP27893784A priority Critical patent/JPS61155982A/ja
Publication of JPS61155982A publication Critical patent/JPS61155982A/ja
Publication of JPH0478154B2 publication Critical patent/JPH0478154B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Radiation (AREA)
JP27893784A 1984-12-28 1984-12-28 Ｘ線透過膜の蒸着方法 Granted JPS61155982A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27893784A JPS61155982A (ja) 1984-12-28 1984-12-28 Ｘ線透過膜の蒸着方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27893784A JPS61155982A (ja) 1984-12-28 1984-12-28 Ｘ線透過膜の蒸着方法

Publications (2)

Publication Number Publication Date
JPS61155982A true JPS61155982A (ja) 1986-07-15
JPH0478154B2 JPH0478154B2 (https=) 1992-12-10

Family

ID=17604145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27893784A Granted JPS61155982A (ja) 1984-12-28 1984-12-28 Ｘ線透過膜の蒸着方法

Country Status (1)

Country Link
JP (1) JPS61155982A (https=)

Also Published As

Publication number Publication date
JPH0478154B2 (https=) 1992-12-10

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