JPH0478154B2 - - Google Patents
Info
- Publication number
- JPH0478154B2 JPH0478154B2 JP27893784A JP27893784A JPH0478154B2 JP H0478154 B2 JPH0478154 B2 JP H0478154B2 JP 27893784 A JP27893784 A JP 27893784A JP 27893784 A JP27893784 A JP 27893784A JP H0478154 B2 JPH0478154 B2 JP H0478154B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- thin film
- vacuum
- ray
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010408 film Substances 0.000 claims description 25
- 239000010409 thin film Substances 0.000 claims description 20
- 238000007740 vapor deposition Methods 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 3
- 239000012528 membrane Substances 0.000 description 16
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Measurement Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27893784A JPS61155982A (ja) | 1984-12-28 | 1984-12-28 | Ｘ線透過膜の蒸着方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27893784A JPS61155982A (ja) | 1984-12-28 | 1984-12-28 | Ｘ線透過膜の蒸着方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61155982A JPS61155982A (ja) | 1986-07-15 |
| JPH0478154B2 true JPH0478154B2 (https=) | 1992-12-10 |
Family
ID=17604145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27893784A Granted JPS61155982A (ja) | 1984-12-28 | 1984-12-28 | Ｘ線透過膜の蒸着方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61155982A (https=) |
-
1984
- 1984-12-28 JP JP27893784A patent/JPS61155982A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61155982A (ja) | 1986-07-15 |
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