JPS61151352U - - Google Patents
Info
- Publication number
- JPS61151352U JPS61151352U JP3515485U JP3515485U JPS61151352U JP S61151352 U JPS61151352 U JP S61151352U JP 3515485 U JP3515485 U JP 3515485U JP 3515485 U JP3515485 U JP 3515485U JP S61151352 U JPS61151352 U JP S61151352U
- Authority
- JP
- Japan
- Prior art keywords
- sensitive part
- semiconductor
- machining
- thickness
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000003754 machining Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Description
第１図は本考案の一実施例の要部断面図、第２
図は従来例の要部断面図、第３図は従来の感圧部
形成工程を示す断面図、第４図は本考案による感
圧部形成工程の一例を順次示す断面図である。
１：半導体チツプ、２：感圧部、３：抵抗ブリ
ツジ、５：基体。
Figure 1 is a sectional view of the main parts of an embodiment of the present invention, Figure 2
3 is a sectional view showing a conventional pressure-sensitive part forming process, and FIG. 4 is a sectional view sequentially showing an example of a pressure-sensitive part forming process according to the present invention. 1: Semiconductor chip, 2: Pressure sensitive part, 3: Resistance bridge, 5: Substrate.
Claims (1)
て機械加工によつて形成された薄い感圧部を有す
ることを特徴とする半導体圧力変換器。 A semiconductor pressure transducer characterized in that it has a thin pressure sensitive part formed mainly by machining in the center of a semiconductor chip with a thickness of 5 to 8 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3515485U JPS61151352U (en) | 1985-03-12 | 1985-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3515485U JPS61151352U (en) | 1985-03-12 | 1985-03-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61151352U true JPS61151352U (en) | 1986-09-18 |
Family
ID=30539174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3515485U Pending JPS61151352U (en) | 1985-03-12 | 1985-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61151352U (en) |
-
1985
- 1985-03-12 JP JP3515485U patent/JPS61151352U/ja active Pending
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