JPS61148004A - ダイシング装置 - Google Patents

ダイシング装置

Info

Publication number
JPS61148004A
JPS61148004A JP60264741A JP26474185A JPS61148004A JP S61148004 A JPS61148004 A JP S61148004A JP 60264741 A JP60264741 A JP 60264741A JP 26474185 A JP26474185 A JP 26474185A JP S61148004 A JPS61148004 A JP S61148004A
Authority
JP
Japan
Prior art keywords
cutting
plate
cleaning water
cooling water
water supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60264741A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0158047B2 (enrdf_load_stackoverflow
Inventor
巳亦　力
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60264741A priority Critical patent/JPS61148004A/ja
Publication of JPS61148004A publication Critical patent/JPS61148004A/ja
Publication of JPH0158047B2 publication Critical patent/JPH0158047B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Dicing (AREA)
JP60264741A 1985-11-27 1985-11-27 ダイシング装置 Granted JPS61148004A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60264741A JPS61148004A (ja) 1985-11-27 1985-11-27 ダイシング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60264741A JPS61148004A (ja) 1985-11-27 1985-11-27 ダイシング装置

Publications (2)

Publication Number Publication Date
JPS61148004A true JPS61148004A (ja) 1986-07-05
JPH0158047B2 JPH0158047B2 (enrdf_load_stackoverflow) 1989-12-08

Family

ID=17407530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60264741A Granted JPS61148004A (ja) 1985-11-27 1985-11-27 ダイシング装置

Country Status (1)

Country Link
JP (1) JPS61148004A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0426708U (enrdf_load_stackoverflow) * 1990-06-26 1992-03-03
JP2007188974A (ja) * 2006-01-11 2007-07-26 Tokyo Seimitsu Co Ltd ダイシング装置
WO2013051375A1 (ja) * 2011-10-05 2013-04-11 シャープ株式会社 ダイシング装置及び半導体装置の製造方法
JP2013225612A (ja) * 2012-04-23 2013-10-31 Disco Abrasive Syst Ltd ウェーハの加工方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015208796A (ja) * 2014-04-24 2015-11-24 株式会社ディスコ バイト切削装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1063904A (en) * 1963-07-13 1967-04-05 Waldrich Werkzeugmasch Method and apparatus for cooling machine tools
JPS4858771A (enrdf_load_stackoverflow) * 1971-11-22 1973-08-17
JPS48104255U (enrdf_load_stackoverflow) * 1972-03-11 1973-12-05
JPS4894985A (enrdf_load_stackoverflow) * 1972-03-17 1973-12-06
JPS493291A (enrdf_load_stackoverflow) * 1972-04-22 1974-01-12
JPS4916072A (enrdf_load_stackoverflow) * 1972-04-10 1974-02-13
JPS6112373A (ja) * 1984-06-29 1986-01-20 Tokyo Electric Co Ltd 印字機

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1063904A (en) * 1963-07-13 1967-04-05 Waldrich Werkzeugmasch Method and apparatus for cooling machine tools
JPS4858771A (enrdf_load_stackoverflow) * 1971-11-22 1973-08-17
JPS48104255U (enrdf_load_stackoverflow) * 1972-03-11 1973-12-05
JPS4894985A (enrdf_load_stackoverflow) * 1972-03-17 1973-12-06
JPS4916072A (enrdf_load_stackoverflow) * 1972-04-10 1974-02-13
JPS493291A (enrdf_load_stackoverflow) * 1972-04-22 1974-01-12
JPS6112373A (ja) * 1984-06-29 1986-01-20 Tokyo Electric Co Ltd 印字機

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0426708U (enrdf_load_stackoverflow) * 1990-06-26 1992-03-03
JP2007188974A (ja) * 2006-01-11 2007-07-26 Tokyo Seimitsu Co Ltd ダイシング装置
WO2013051375A1 (ja) * 2011-10-05 2013-04-11 シャープ株式会社 ダイシング装置及び半導体装置の製造方法
JP2013225612A (ja) * 2012-04-23 2013-10-31 Disco Abrasive Syst Ltd ウェーハの加工方法

Also Published As

Publication number Publication date
JPH0158047B2 (enrdf_load_stackoverflow) 1989-12-08

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