JPS61140934U - - Google Patents
Info
- Publication number
- JPS61140934U JPS61140934U JP2422085U JP2422085U JPS61140934U JP S61140934 U JPS61140934 U JP S61140934U JP 2422085 U JP2422085 U JP 2422085U JP 2422085 U JP2422085 U JP 2422085U JP S61140934 U JPS61140934 U JP S61140934U
- Authority
- JP
- Japan
- Prior art keywords
- seal cap
- strain gauge
- diaphragm
- pressure sensor
- semiconductor strain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2422085U JPS61140934U (de) | 1985-02-22 | 1985-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2422085U JPS61140934U (de) | 1985-02-22 | 1985-02-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61140934U true JPS61140934U (de) | 1986-09-01 |
Family
ID=30518173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2422085U Pending JPS61140934U (de) | 1985-02-22 | 1985-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61140934U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014238365A (ja) * | 2013-06-10 | 2014-12-18 | 長野計器株式会社 | センサ |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5367478A (en) * | 1976-11-29 | 1978-06-15 | Hitachi Ltd | Pressure detector |
| JPS5461975A (en) * | 1977-10-26 | 1979-05-18 | Hitachi Ltd | Detector of differential pressure, pressure and load |
| JPS5515293A (en) * | 1978-07-20 | 1980-02-02 | Hitachi Ltd | Absolute pressure type pressure senser |
-
1985
- 1985-02-22 JP JP2422085U patent/JPS61140934U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5367478A (en) * | 1976-11-29 | 1978-06-15 | Hitachi Ltd | Pressure detector |
| JPS5461975A (en) * | 1977-10-26 | 1979-05-18 | Hitachi Ltd | Detector of differential pressure, pressure and load |
| JPS5515293A (en) * | 1978-07-20 | 1980-02-02 | Hitachi Ltd | Absolute pressure type pressure senser |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014238365A (ja) * | 2013-06-10 | 2014-12-18 | 長野計器株式会社 | センサ |
| US9389134B2 (en) | 2013-06-10 | 2016-07-12 | Nagano Keiki Co., Ltd. | Synthetic resin based pressure sensor with a three-dimensional circuit |