JPS62163740U - - Google Patents
Info
- Publication number
- JPS62163740U JPS62163740U JP5342886U JP5342886U JPS62163740U JP S62163740 U JPS62163740 U JP S62163740U JP 5342886 U JP5342886 U JP 5342886U JP 5342886 U JP5342886 U JP 5342886U JP S62163740 U JPS62163740 U JP S62163740U
- Authority
- JP
- Japan
- Prior art keywords
- pressure support
- diaphragm
- insulating film
- support body
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000010408 film Substances 0.000 claims description 3
- 239000003513 alkali Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
Landscapes
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5342886U JPS62163740U (de) | 1986-04-09 | 1986-04-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5342886U JPS62163740U (de) | 1986-04-09 | 1986-04-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62163740U true JPS62163740U (de) | 1987-10-17 |
Family
ID=30879482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5342886U Pending JPS62163740U (de) | 1986-04-09 | 1986-04-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62163740U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007058010A1 (ja) * | 2005-11-15 | 2007-05-24 | Mitsubishi Electric Corporation | 半導体圧力センサおよびその製造方法 |
-
1986
- 1986-04-09 JP JP5342886U patent/JPS62163740U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007058010A1 (ja) * | 2005-11-15 | 2007-05-24 | Mitsubishi Electric Corporation | 半導体圧力センサおよびその製造方法 |
| JPWO2007058010A1 (ja) * | 2005-11-15 | 2009-04-30 | 三菱電機株式会社 | 半導体圧力センサおよびその製造方法 |
| JP4916449B2 (ja) * | 2005-11-15 | 2012-04-11 | 三菱電機株式会社 | 半導体圧力センサおよびその製造方法 |