JPH0184041U - - Google Patents
Info
- Publication number
- JPH0184041U JPH0184041U JP1987178594U JP17859487U JPH0184041U JP H0184041 U JPH0184041 U JP H0184041U JP 1987178594 U JP1987178594 U JP 1987178594U JP 17859487 U JP17859487 U JP 17859487U JP H0184041 U JPH0184041 U JP H0184041U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- glass substrate
- concave part
- measurement pressure
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000004020 conductor Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178594U JPH0184041U (de) | 1987-11-24 | 1987-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178594U JPH0184041U (de) | 1987-11-24 | 1987-11-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0184041U true JPH0184041U (de) | 1989-06-05 |
Family
ID=31470203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987178594U Pending JPH0184041U (de) | 1987-11-24 | 1987-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0184041U (de) |
-
1987
- 1987-11-24 JP JP1987178594U patent/JPH0184041U/ja active Pending