JPS63178353U - - Google Patents
Info
- Publication number
- JPS63178353U JPS63178353U JP7081587U JP7081587U JPS63178353U JP S63178353 U JPS63178353 U JP S63178353U JP 7081587 U JP7081587 U JP 7081587U JP 7081587 U JP7081587 U JP 7081587U JP S63178353 U JPS63178353 U JP S63178353U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- silicon substrate
- measurement pressure
- pressure sensor
- semiconductor pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7081587U JPH0533018Y2 (de) | 1987-05-12 | 1987-05-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7081587U JPH0533018Y2 (de) | 1987-05-12 | 1987-05-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63178353U true JPS63178353U (de) | 1988-11-18 |
| JPH0533018Y2 JPH0533018Y2 (de) | 1993-08-23 |
Family
ID=30912794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7081587U Expired - Lifetime JPH0533018Y2 (de) | 1987-05-12 | 1987-05-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0533018Y2 (de) |
-
1987
- 1987-05-12 JP JP7081587U patent/JPH0533018Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0533018Y2 (de) | 1993-08-23 |