JPS6430855U - - Google Patents
Info
- Publication number
- JPS6430855U JPS6430855U JP12542687U JP12542687U JPS6430855U JP S6430855 U JPS6430855 U JP S6430855U JP 12542687 U JP12542687 U JP 12542687U JP 12542687 U JP12542687 U JP 12542687U JP S6430855 U JPS6430855 U JP S6430855U
- Authority
- JP
- Japan
- Prior art keywords
- chip
- semiconductor
- gauge
- sensor
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12542687U JPS6430855U (de) | 1987-08-18 | 1987-08-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12542687U JPS6430855U (de) | 1987-08-18 | 1987-08-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6430855U true JPS6430855U (de) | 1989-02-27 |
Family
ID=31376022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12542687U Pending JPS6430855U (de) | 1987-08-18 | 1987-08-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6430855U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009186249A (ja) * | 2008-02-05 | 2009-08-20 | Yokogawa Electric Corp | 圧力測定装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5519811A (en) * | 1978-07-28 | 1980-02-12 | Hitachi Ltd | Semiconductor pressure transducer |
| JPS6122874A (ja) * | 1984-07-10 | 1986-01-31 | 住友ゴム工業株式会社 | 打球具 |
-
1987
- 1987-08-18 JP JP12542687U patent/JPS6430855U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5519811A (en) * | 1978-07-28 | 1980-02-12 | Hitachi Ltd | Semiconductor pressure transducer |
| JPS6122874A (ja) * | 1984-07-10 | 1986-01-31 | 住友ゴム工業株式会社 | 打球具 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009186249A (ja) * | 2008-02-05 | 2009-08-20 | Yokogawa Electric Corp | 圧力測定装置 |