JPS6367266U - - Google Patents
Info
- Publication number
- JPS6367266U JPS6367266U JP16256486U JP16256486U JPS6367266U JP S6367266 U JPS6367266 U JP S6367266U JP 16256486 U JP16256486 U JP 16256486U JP 16256486 U JP16256486 U JP 16256486U JP S6367266 U JPS6367266 U JP S6367266U
- Authority
- JP
- Japan
- Prior art keywords
- sensor chip
- diaphragm
- semiconductor
- recess
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000011521 glass Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16256486U JPS6367266U (de) | 1986-10-23 | 1986-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16256486U JPS6367266U (de) | 1986-10-23 | 1986-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6367266U true JPS6367266U (de) | 1988-05-06 |
Family
ID=31089945
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16256486U Pending JPS6367266U (de) | 1986-10-23 | 1986-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6367266U (de) |
-
1986
- 1986-10-23 JP JP16256486U patent/JPS6367266U/ja active Pending