JPS63114048U - - Google Patents
Info
- Publication number
- JPS63114048U JPS63114048U JP500587U JP500587U JPS63114048U JP S63114048 U JPS63114048 U JP S63114048U JP 500587 U JP500587 U JP 500587U JP 500587 U JP500587 U JP 500587U JP S63114048 U JPS63114048 U JP S63114048U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- piezoresistors
- semiconductor
- pressure sensor
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000009792 diffusion process Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP500587U JPS63114048U (de) | 1987-01-16 | 1987-01-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP500587U JPS63114048U (de) | 1987-01-16 | 1987-01-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63114048U true JPS63114048U (de) | 1988-07-22 |
Family
ID=30786186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP500587U Pending JPS63114048U (de) | 1987-01-16 | 1987-01-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63114048U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0425256U (de) * | 1990-06-25 | 1992-02-28 | ||
| JP2011220927A (ja) * | 2010-04-13 | 2011-11-04 | Yamatake Corp | 圧力センサ |
-
1987
- 1987-01-16 JP JP500587U patent/JPS63114048U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0425256U (de) * | 1990-06-25 | 1992-02-28 | ||
| JP2011220927A (ja) * | 2010-04-13 | 2011-11-04 | Yamatake Corp | 圧力センサ |