JPH01179237U - - Google Patents
Info
- Publication number
- JPH01179237U JPH01179237U JP7545388U JP7545388U JPH01179237U JP H01179237 U JPH01179237 U JP H01179237U JP 7545388 U JP7545388 U JP 7545388U JP 7545388 U JP7545388 U JP 7545388U JP H01179237 U JPH01179237 U JP H01179237U
- Authority
- JP
- Japan
- Prior art keywords
- main body
- body substrate
- pressure
- sensor chip
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 5
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000011521 glass Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7545388U JPH01179237U (de) | 1988-06-07 | 1988-06-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7545388U JPH01179237U (de) | 1988-06-07 | 1988-06-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01179237U true JPH01179237U (de) | 1989-12-22 |
Family
ID=31300521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7545388U Pending JPH01179237U (de) | 1988-06-07 | 1988-06-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01179237U (de) |
-
1988
- 1988-06-07 JP JP7545388U patent/JPH01179237U/ja active Pending