JPS62184447U - - Google Patents
Info
- Publication number
- JPS62184447U JPS62184447U JP7181286U JP7181286U JPS62184447U JP S62184447 U JPS62184447 U JP S62184447U JP 7181286 U JP7181286 U JP 7181286U JP 7181286 U JP7181286 U JP 7181286U JP S62184447 U JPS62184447 U JP S62184447U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- diaphragm
- case
- introduction path
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000835 fiber Substances 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7181286U JPS62184447U (de) | 1986-05-15 | 1986-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7181286U JPS62184447U (de) | 1986-05-15 | 1986-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62184447U true JPS62184447U (de) | 1987-11-24 |
Family
ID=30914704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7181286U Pending JPS62184447U (de) | 1986-05-15 | 1986-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62184447U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001165799A (ja) * | 1999-10-28 | 2001-06-22 | Motorola Inc | 物理センサの構成装置 |
-
1986
- 1986-05-15 JP JP7181286U patent/JPS62184447U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001165799A (ja) * | 1999-10-28 | 2001-06-22 | Motorola Inc | 物理センサの構成装置 |