JPS61139705A - 位置検出装置 - Google Patents
位置検出装置Info
- Publication number
- JPS61139705A JPS61139705A JP26237984A JP26237984A JPS61139705A JP S61139705 A JPS61139705 A JP S61139705A JP 26237984 A JP26237984 A JP 26237984A JP 26237984 A JP26237984 A JP 26237984A JP S61139705 A JPS61139705 A JP S61139705A
- Authority
- JP
- Japan
- Prior art keywords
- light
- sample
- reflected light
- slit
- optical axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 53
- 238000001514 detection method Methods 0.000 claims abstract description 24
- 238000010408 sweeping Methods 0.000 claims abstract description 5
- 238000006073 displacement reaction Methods 0.000 abstract description 12
- 238000010586 diagram Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000007689 inspection Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26237984A JPS61139705A (ja) | 1984-12-11 | 1984-12-11 | 位置検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26237984A JPS61139705A (ja) | 1984-12-11 | 1984-12-11 | 位置検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61139705A true JPS61139705A (ja) | 1986-06-27 |
| JPH0533322B2 JPH0533322B2 (enrdf_load_stackoverflow) | 1993-05-19 |
Family
ID=17374935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26237984A Granted JPS61139705A (ja) | 1984-12-11 | 1984-12-11 | 位置検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61139705A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006075782A (ja) * | 2004-09-13 | 2006-03-23 | Shin Meiwa Ind Co Ltd | 曝気槽の泡抑制装置及びそれを備えた生ごみ処理装置 |
-
1984
- 1984-12-11 JP JP26237984A patent/JPS61139705A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006075782A (ja) * | 2004-09-13 | 2006-03-23 | Shin Meiwa Ind Co Ltd | 曝気槽の泡抑制装置及びそれを備えた生ごみ処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0533322B2 (enrdf_load_stackoverflow) | 1993-05-19 |
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