JPS61137332A - 高速半導体装置の製造方法 - Google Patents

高速半導体装置の製造方法

Info

Publication number
JPS61137332A
JPS61137332A JP59259752A JP25975284A JPS61137332A JP S61137332 A JPS61137332 A JP S61137332A JP 59259752 A JP59259752 A JP 59259752A JP 25975284 A JP25975284 A JP 25975284A JP S61137332 A JPS61137332 A JP S61137332A
Authority
JP
Japan
Prior art keywords
semiconductor device
speed semiconductor
killer
temperature
high speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59259752A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0516660B2 (enExample
Inventor
Tadao Takano
高野　忠夫
Seiichi Miyagawa
宮川　誠一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Rectifier Corp Japan Ltd
Original Assignee
International Rectifier Corp Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Rectifier Corp Japan Ltd filed Critical International Rectifier Corp Japan Ltd
Priority to JP59259752A priority Critical patent/JPS61137332A/ja
Publication of JPS61137332A publication Critical patent/JPS61137332A/ja
Publication of JPH0516660B2 publication Critical patent/JPH0516660B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P36/03—

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)
JP59259752A 1984-12-08 1984-12-08 高速半導体装置の製造方法 Granted JPS61137332A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59259752A JPS61137332A (ja) 1984-12-08 1984-12-08 高速半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59259752A JPS61137332A (ja) 1984-12-08 1984-12-08 高速半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS61137332A true JPS61137332A (ja) 1986-06-25
JPH0516660B2 JPH0516660B2 (enExample) 1993-03-05

Family

ID=17338458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59259752A Granted JPS61137332A (ja) 1984-12-08 1984-12-08 高速半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS61137332A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6444023A (en) * 1987-08-12 1989-02-16 Hitachi Ltd Heat treatment
US5916368A (en) * 1997-02-27 1999-06-29 The Fairchild Corporation Method and apparatus for temperature controlled spin-coating systems

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6444023A (en) * 1987-08-12 1989-02-16 Hitachi Ltd Heat treatment
US5916368A (en) * 1997-02-27 1999-06-29 The Fairchild Corporation Method and apparatus for temperature controlled spin-coating systems

Also Published As

Publication number Publication date
JPH0516660B2 (enExample) 1993-03-05

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