JPH0516660B2 - - Google Patents

Info

Publication number
JPH0516660B2
JPH0516660B2 JP59259752A JP25975284A JPH0516660B2 JP H0516660 B2 JPH0516660 B2 JP H0516660B2 JP 59259752 A JP59259752 A JP 59259752A JP 25975284 A JP25975284 A JP 25975284A JP H0516660 B2 JPH0516660 B2 JP H0516660B2
Authority
JP
Japan
Prior art keywords
temperature
manufacturing
lifetime
semiconductor device
speed semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59259752A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61137332A (ja
Inventor
Tadao Takano
Seiichi Myagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Inter Electronics Corp
Original Assignee
Nihon Inter Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Inter Electronics Corp filed Critical Nihon Inter Electronics Corp
Priority to JP59259752A priority Critical patent/JPS61137332A/ja
Publication of JPS61137332A publication Critical patent/JPS61137332A/ja
Publication of JPH0516660B2 publication Critical patent/JPH0516660B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P36/03—

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)
JP59259752A 1984-12-08 1984-12-08 高速半導体装置の製造方法 Granted JPS61137332A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59259752A JPS61137332A (ja) 1984-12-08 1984-12-08 高速半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59259752A JPS61137332A (ja) 1984-12-08 1984-12-08 高速半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS61137332A JPS61137332A (ja) 1986-06-25
JPH0516660B2 true JPH0516660B2 (enExample) 1993-03-05

Family

ID=17338458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59259752A Granted JPS61137332A (ja) 1984-12-08 1984-12-08 高速半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS61137332A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2675011B2 (ja) * 1987-08-12 1997-11-12 株式会社日立製作所 熱処理装置及び熱処理方法
US5916368A (en) * 1997-02-27 1999-06-29 The Fairchild Corporation Method and apparatus for temperature controlled spin-coating systems

Also Published As

Publication number Publication date
JPS61137332A (ja) 1986-06-25

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