JPS61135460U - - Google Patents

Info

Publication number
JPS61135460U
JPS61135460U JP1923785U JP1923785U JPS61135460U JP S61135460 U JPS61135460 U JP S61135460U JP 1923785 U JP1923785 U JP 1923785U JP 1923785 U JP1923785 U JP 1923785U JP S61135460 U JPS61135460 U JP S61135460U
Authority
JP
Japan
Prior art keywords
sample
irradiating
particle beam
positions
analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1923785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0314775Y2 (no
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985019237U priority Critical patent/JPH0314775Y2/ja
Publication of JPS61135460U publication Critical patent/JPS61135460U/ja
Application granted granted Critical
Publication of JPH0314775Y2 publication Critical patent/JPH0314775Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1985019237U 1985-02-14 1985-02-14 Expired JPH0314775Y2 (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985019237U JPH0314775Y2 (no) 1985-02-14 1985-02-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985019237U JPH0314775Y2 (no) 1985-02-14 1985-02-14

Publications (2)

Publication Number Publication Date
JPS61135460U true JPS61135460U (no) 1986-08-23
JPH0314775Y2 JPH0314775Y2 (no) 1991-04-02

Family

ID=30508626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985019237U Expired JPH0314775Y2 (no) 1985-02-14 1985-02-14

Country Status (1)

Country Link
JP (1) JPH0314775Y2 (no)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6312153U (no) * 1986-07-08 1988-01-26
JPS6420434A (en) * 1987-07-15 1989-01-24 Shimadzu Corp Ion etching device
JP2009204511A (ja) * 2008-02-28 2009-09-10 Yazaki Corp シール検査方法、及びシール検査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5327484A (en) * 1976-08-27 1978-03-14 Hitachi Ltd Ion microanalyzer
JPS55130053A (en) * 1979-03-30 1980-10-08 Jeol Ltd Sampler in scanning electron microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5327484A (en) * 1976-08-27 1978-03-14 Hitachi Ltd Ion microanalyzer
JPS55130053A (en) * 1979-03-30 1980-10-08 Jeol Ltd Sampler in scanning electron microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6312153U (no) * 1986-07-08 1988-01-26
JPS6420434A (en) * 1987-07-15 1989-01-24 Shimadzu Corp Ion etching device
JP2009204511A (ja) * 2008-02-28 2009-09-10 Yazaki Corp シール検査方法、及びシール検査装置

Also Published As

Publication number Publication date
JPH0314775Y2 (no) 1991-04-02

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