JPS55130053A - Sampler in scanning electron microscope - Google Patents

Sampler in scanning electron microscope

Info

Publication number
JPS55130053A
JPS55130053A JP3810479A JP3810479A JPS55130053A JP S55130053 A JPS55130053 A JP S55130053A JP 3810479 A JP3810479 A JP 3810479A JP 3810479 A JP3810479 A JP 3810479A JP S55130053 A JPS55130053 A JP S55130053A
Authority
JP
Japan
Prior art keywords
sample
electron microscope
scanning electron
sample stage
sampler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3810479A
Other languages
Japanese (ja)
Inventor
Yoshinori Takaba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP3810479A priority Critical patent/JPS55130053A/en
Publication of JPS55130053A publication Critical patent/JPS55130053A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To make easy the handling of sample mounting, by eliminating the need for replacement of a whole sample stage by mounting and dismounting a rotary table on the sample stage and constituting the sample stage with a scanning electron microscope and an X-ray microanalyzer. CONSTITUTION:When a sample 19 to be observed through a sample holder 18 is mounted in a hole 10 of a body of rotation 5, the sample 19 can rotate on its own optical axis and be used as a scanning electron microscope sample stage by actuating a pickup device 17. Subsequently, by removing the sample holder 18 from the body of rotation 5 and mounting a rotary table in a hole 11 of a body of rotation 6, a number of samples to be analyzed can be retained on a moving body and the sampler can be used as an X-ray microanalizer sample stage.
JP3810479A 1979-03-30 1979-03-30 Sampler in scanning electron microscope Pending JPS55130053A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3810479A JPS55130053A (en) 1979-03-30 1979-03-30 Sampler in scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3810479A JPS55130053A (en) 1979-03-30 1979-03-30 Sampler in scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS55130053A true JPS55130053A (en) 1980-10-08

Family

ID=12516157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3810479A Pending JPS55130053A (en) 1979-03-30 1979-03-30 Sampler in scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS55130053A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61135460U (en) * 1985-02-14 1986-08-23

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61135460U (en) * 1985-02-14 1986-08-23
JPH0314775Y2 (en) * 1985-02-14 1991-04-02

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