JPH0298627U - - Google Patents
Info
- Publication number
- JPH0298627U JPH0298627U JP773489U JP773489U JPH0298627U JP H0298627 U JPH0298627 U JP H0298627U JP 773489 U JP773489 U JP 773489U JP 773489 U JP773489 U JP 773489U JP H0298627 U JPH0298627 U JP H0298627U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- thin film
- shutter
- rotating shaft
- sources
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 230000004313 glare Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP773489U JPH0298627U (no) | 1989-01-26 | 1989-01-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP773489U JPH0298627U (no) | 1989-01-26 | 1989-01-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0298627U true JPH0298627U (no) | 1990-08-06 |
Family
ID=31212998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP773489U Pending JPH0298627U (no) | 1989-01-26 | 1989-01-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0298627U (no) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63204712A (ja) * | 1987-02-20 | 1988-08-24 | Fujitsu Ltd | 分子線結晶成長装置 |
-
1989
- 1989-01-26 JP JP773489U patent/JPH0298627U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63204712A (ja) * | 1987-02-20 | 1988-08-24 | Fujitsu Ltd | 分子線結晶成長装置 |