JPH02102653U - - Google Patents
Info
- Publication number
- JPH02102653U JPH02102653U JP1190689U JP1190689U JPH02102653U JP H02102653 U JPH02102653 U JP H02102653U JP 1190689 U JP1190689 U JP 1190689U JP 1190689 U JP1190689 U JP 1190689U JP H02102653 U JPH02102653 U JP H02102653U
- Authority
- JP
- Japan
- Prior art keywords
- ion implantation
- batch
- samples
- sample
- type ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000010884 ion-beam technique Methods 0.000 description 3
- 238000002513 implantation Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1190689U JPH02102653U (no) | 1989-02-03 | 1989-02-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1190689U JPH02102653U (no) | 1989-02-03 | 1989-02-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02102653U true JPH02102653U (no) | 1990-08-15 |
Family
ID=31220873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1190689U Pending JPH02102653U (no) | 1989-02-03 | 1989-02-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02102653U (no) |
-
1989
- 1989-02-03 JP JP1190689U patent/JPH02102653U/ja active Pending