JPS61135460U - - Google Patents

Info

Publication number
JPS61135460U
JPS61135460U JP1923785U JP1923785U JPS61135460U JP S61135460 U JPS61135460 U JP S61135460U JP 1923785 U JP1923785 U JP 1923785U JP 1923785 U JP1923785 U JP 1923785U JP S61135460 U JPS61135460 U JP S61135460U
Authority
JP
Japan
Prior art keywords
sample
irradiating
particle beam
positions
analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1923785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0314775Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985019237U priority Critical patent/JPH0314775Y2/ja
Publication of JPS61135460U publication Critical patent/JPS61135460U/ja
Application granted granted Critical
Publication of JPH0314775Y2 publication Critical patent/JPH0314775Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1985019237U 1985-02-14 1985-02-14 Expired JPH0314775Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985019237U JPH0314775Y2 (enrdf_load_stackoverflow) 1985-02-14 1985-02-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985019237U JPH0314775Y2 (enrdf_load_stackoverflow) 1985-02-14 1985-02-14

Publications (2)

Publication Number Publication Date
JPS61135460U true JPS61135460U (enrdf_load_stackoverflow) 1986-08-23
JPH0314775Y2 JPH0314775Y2 (enrdf_load_stackoverflow) 1991-04-02

Family

ID=30508626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985019237U Expired JPH0314775Y2 (enrdf_load_stackoverflow) 1985-02-14 1985-02-14

Country Status (1)

Country Link
JP (1) JPH0314775Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6312153U (enrdf_load_stackoverflow) * 1986-07-08 1988-01-26
JPS6420434A (en) * 1987-07-15 1989-01-24 Shimadzu Corp Ion etching device
JP2009204511A (ja) * 2008-02-28 2009-09-10 Yazaki Corp シール検査方法、及びシール検査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5327484A (en) * 1976-08-27 1978-03-14 Hitachi Ltd Ion microanalyzer
JPS55130053A (en) * 1979-03-30 1980-10-08 Jeol Ltd Sampler in scanning electron microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5327484A (en) * 1976-08-27 1978-03-14 Hitachi Ltd Ion microanalyzer
JPS55130053A (en) * 1979-03-30 1980-10-08 Jeol Ltd Sampler in scanning electron microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6312153U (enrdf_load_stackoverflow) * 1986-07-08 1988-01-26
JPS6420434A (en) * 1987-07-15 1989-01-24 Shimadzu Corp Ion etching device
JP2009204511A (ja) * 2008-02-28 2009-09-10 Yazaki Corp シール検査方法、及びシール検査装置

Also Published As

Publication number Publication date
JPH0314775Y2 (enrdf_load_stackoverflow) 1991-04-02

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