JPS629323Y2 - - Google Patents

Info

Publication number
JPS629323Y2
JPS629323Y2 JP17638982U JP17638982U JPS629323Y2 JP S629323 Y2 JPS629323 Y2 JP S629323Y2 JP 17638982 U JP17638982 U JP 17638982U JP 17638982 U JP17638982 U JP 17638982U JP S629323 Y2 JPS629323 Y2 JP S629323Y2
Authority
JP
Japan
Prior art keywords
evaporation source
evaporation
vapor deposition
tape
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17638982U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5980467U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17638982U priority Critical patent/JPS5980467U/ja
Publication of JPS5980467U publication Critical patent/JPS5980467U/ja
Application granted granted Critical
Publication of JPS629323Y2 publication Critical patent/JPS629323Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP17638982U 1982-11-20 1982-11-20 蒸着装置 Granted JPS5980467U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17638982U JPS5980467U (ja) 1982-11-20 1982-11-20 蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17638982U JPS5980467U (ja) 1982-11-20 1982-11-20 蒸着装置

Publications (2)

Publication Number Publication Date
JPS5980467U JPS5980467U (ja) 1984-05-31
JPS629323Y2 true JPS629323Y2 (enrdf_load_stackoverflow) 1987-03-04

Family

ID=30383508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17638982U Granted JPS5980467U (ja) 1982-11-20 1982-11-20 蒸着装置

Country Status (1)

Country Link
JP (1) JPS5980467U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5980467U (ja) 1984-05-31

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