JPS5980467U - 蒸着装置 - Google Patents

蒸着装置

Info

Publication number
JPS5980467U
JPS5980467U JP17638982U JP17638982U JPS5980467U JP S5980467 U JPS5980467 U JP S5980467U JP 17638982 U JP17638982 U JP 17638982U JP 17638982 U JP17638982 U JP 17638982U JP S5980467 U JPS5980467 U JP S5980467U
Authority
JP
Japan
Prior art keywords
vapor deposition
deposition equipment
evaporation source
tape
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17638982U
Other languages
English (en)
Japanese (ja)
Other versions
JPS629323Y2 (enrdf_load_stackoverflow
Inventor
亀谷　実
渡辺　源一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP17638982U priority Critical patent/JPS5980467U/ja
Publication of JPS5980467U publication Critical patent/JPS5980467U/ja
Application granted granted Critical
Publication of JPS629323Y2 publication Critical patent/JPS629323Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP17638982U 1982-11-20 1982-11-20 蒸着装置 Granted JPS5980467U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17638982U JPS5980467U (ja) 1982-11-20 1982-11-20 蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17638982U JPS5980467U (ja) 1982-11-20 1982-11-20 蒸着装置

Publications (2)

Publication Number Publication Date
JPS5980467U true JPS5980467U (ja) 1984-05-31
JPS629323Y2 JPS629323Y2 (enrdf_load_stackoverflow) 1987-03-04

Family

ID=30383508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17638982U Granted JPS5980467U (ja) 1982-11-20 1982-11-20 蒸着装置

Country Status (1)

Country Link
JP (1) JPS5980467U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS629323Y2 (enrdf_load_stackoverflow) 1987-03-04

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