JPH0342034Y2 - - Google Patents
Info
- Publication number
- JPH0342034Y2 JPH0342034Y2 JP1749285U JP1749285U JPH0342034Y2 JP H0342034 Y2 JPH0342034 Y2 JP H0342034Y2 JP 1749285 U JP1749285 U JP 1749285U JP 1749285 U JP1749285 U JP 1749285U JP H0342034 Y2 JPH0342034 Y2 JP H0342034Y2
- Authority
- JP
- Japan
- Prior art keywords
- filament
- crucible
- metal vapor
- thin film
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 19
- 239000010409 thin film Substances 0.000 claims description 11
- 150000002500 ions Chemical class 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000010408 film Substances 0.000 description 2
- NMFHJNAPXOMSRX-PUPDPRJKSA-N [(1r)-3-(3,4-dimethoxyphenyl)-1-[3-(2-morpholin-4-ylethoxy)phenyl]propyl] (2s)-1-[(2s)-2-(3,4,5-trimethoxyphenyl)butanoyl]piperidine-2-carboxylate Chemical compound C([C@@H](OC(=O)[C@@H]1CCCCN1C(=O)[C@@H](CC)C=1C=C(OC)C(OC)=C(OC)C=1)C=1C=C(OCCN2CCOCC2)C=CC=1)CC1=CC=C(OC)C(OC)=C1 NMFHJNAPXOMSRX-PUPDPRJKSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1749285U JPH0342034Y2 (enrdf_load_stackoverflow) | 1985-02-08 | 1985-02-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1749285U JPH0342034Y2 (enrdf_load_stackoverflow) | 1985-02-08 | 1985-02-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61133558U JPS61133558U (enrdf_load_stackoverflow) | 1986-08-20 |
| JPH0342034Y2 true JPH0342034Y2 (enrdf_load_stackoverflow) | 1991-09-03 |
Family
ID=30505245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1749285U Expired JPH0342034Y2 (enrdf_load_stackoverflow) | 1985-02-08 | 1985-02-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0342034Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5104695A (en) * | 1989-09-08 | 1992-04-14 | International Business Machines Corporation | Method and apparatus for vapor deposition of material onto a substrate |
-
1985
- 1985-02-08 JP JP1749285U patent/JPH0342034Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61133558U (enrdf_load_stackoverflow) | 1986-08-20 |
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