JPS6113393B2 - - Google Patents
Info
- Publication number
- JPS6113393B2 JPS6113393B2 JP12661777A JP12661777A JPS6113393B2 JP S6113393 B2 JPS6113393 B2 JP S6113393B2 JP 12661777 A JP12661777 A JP 12661777A JP 12661777 A JP12661777 A JP 12661777A JP S6113393 B2 JPS6113393 B2 JP S6113393B2
- Authority
- JP
- Japan
- Prior art keywords
- polycrystalline silicon
- layer
- oxide film
- silicon
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 27
- 239000004065 semiconductor Substances 0.000 claims description 10
- 239000004020 conductor Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 229910052814 silicon oxide Inorganic materials 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 239000012535 impurity Substances 0.000 description 5
- 230000015654 memory Effects 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000001947 vapour-phase growth Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Non-Volatile Memory (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12661777A JPS5459875A (en) | 1977-10-20 | 1977-10-20 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12661777A JPS5459875A (en) | 1977-10-20 | 1977-10-20 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5459875A JPS5459875A (en) | 1979-05-14 |
| JPS6113393B2 true JPS6113393B2 (enrdf_load_stackoverflow) | 1986-04-12 |
Family
ID=14939628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12661777A Granted JPS5459875A (en) | 1977-10-20 | 1977-10-20 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5459875A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020111265A1 (ja) | 2018-11-30 | 2020-06-04 | 株式会社 資生堂 | 色素沈着皮膚モデルおよびその製造方法、ならびに皮膚の色素沈着を治療または予防するための因子の評価方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0215293A (ja) * | 1989-05-25 | 1990-01-18 | Yamaha Corp | 電子楽器 |
-
1977
- 1977-10-20 JP JP12661777A patent/JPS5459875A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020111265A1 (ja) | 2018-11-30 | 2020-06-04 | 株式会社 資生堂 | 色素沈着皮膚モデルおよびその製造方法、ならびに皮膚の色素沈着を治療または予防するための因子の評価方法 |
| KR20210097116A (ko) | 2018-11-30 | 2021-08-06 | 가부시키가이샤 시세이도 | 색소 침착 피부 모델 및 그 제조 방법, 및 피부의 색소 침착을 치료 또는 예방하기 위한 인자의 평가 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5459875A (en) | 1979-05-14 |
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