JPS6113392B2 - - Google Patents
Info
- Publication number
- JPS6113392B2 JPS6113392B2 JP52004136A JP413677A JPS6113392B2 JP S6113392 B2 JPS6113392 B2 JP S6113392B2 JP 52004136 A JP52004136 A JP 52004136A JP 413677 A JP413677 A JP 413677A JP S6113392 B2 JPS6113392 B2 JP S6113392B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- gate
- semiconductor substrate
- insulating film
- island
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 26
- 239000004065 semiconductor Substances 0.000 claims description 23
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- 230000003647 oxidation Effects 0.000 claims description 9
- 238000007254 oxidation reaction Methods 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 230000001590 oxidative effect Effects 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229920002120 photoresistant polymer Polymers 0.000 description 9
- 239000012535 impurity Substances 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 238000001259 photo etching Methods 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
Landscapes
- Local Oxidation Of Silicon (AREA)
- Weting (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP413677A JPS5389377A (en) | 1977-01-17 | 1977-01-17 | Semiconductor device and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP413677A JPS5389377A (en) | 1977-01-17 | 1977-01-17 | Semiconductor device and its production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5389377A JPS5389377A (en) | 1978-08-05 |
| JPS6113392B2 true JPS6113392B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-04-12 |
Family
ID=11576354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP413677A Granted JPS5389377A (en) | 1977-01-17 | 1977-01-17 | Semiconductor device and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5389377A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007194562A (ja) * | 2006-01-23 | 2007-08-02 | Nec Electronics Corp | 半導体装置及びその製造方法 |
-
1977
- 1977-01-17 JP JP413677A patent/JPS5389377A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5389377A (en) | 1978-08-05 |