JPS5389377A - Semiconductor device and its production - Google Patents

Semiconductor device and its production

Info

Publication number
JPS5389377A
JPS5389377A JP413677A JP413677A JPS5389377A JP S5389377 A JPS5389377 A JP S5389377A JP 413677 A JP413677 A JP 413677A JP 413677 A JP413677 A JP 413677A JP S5389377 A JPS5389377 A JP S5389377A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
regions
increase
selfalignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP413677A
Other languages
Japanese (ja)
Other versions
JPS6113392B2 (en
Inventor
Eisuke Ichinohe
Takeshi Ishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP413677A priority Critical patent/JPS5389377A/en
Publication of JPS5389377A publication Critical patent/JPS5389377A/en
Publication of JPS6113392B2 publication Critical patent/JPS6113392B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Weting (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: To increase the scale of integration of Si gate MOS,ICs and increase speed by forming transistor regions and contact regions encircled by field regions in selfalignment structure.
COPYRIGHT: (C)1978,JPO&Japio
JP413677A 1977-01-17 1977-01-17 Semiconductor device and its production Granted JPS5389377A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP413677A JPS5389377A (en) 1977-01-17 1977-01-17 Semiconductor device and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP413677A JPS5389377A (en) 1977-01-17 1977-01-17 Semiconductor device and its production

Publications (2)

Publication Number Publication Date
JPS5389377A true JPS5389377A (en) 1978-08-05
JPS6113392B2 JPS6113392B2 (en) 1986-04-12

Family

ID=11576354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP413677A Granted JPS5389377A (en) 1977-01-17 1977-01-17 Semiconductor device and its production

Country Status (1)

Country Link
JP (1) JPS5389377A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007194562A (en) * 2006-01-23 2007-08-02 Nec Electronics Corp Semiconductor device and its fabrication process

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007194562A (en) * 2006-01-23 2007-08-02 Nec Electronics Corp Semiconductor device and its fabrication process

Also Published As

Publication number Publication date
JPS6113392B2 (en) 1986-04-12

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