JPS5389377A - Semiconductor device and its production - Google Patents
Semiconductor device and its productionInfo
- Publication number
- JPS5389377A JPS5389377A JP413677A JP413677A JPS5389377A JP S5389377 A JPS5389377 A JP S5389377A JP 413677 A JP413677 A JP 413677A JP 413677 A JP413677 A JP 413677A JP S5389377 A JPS5389377 A JP S5389377A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- regions
- increase
- selfalignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Weting (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE: To increase the scale of integration of Si gate MOS,ICs and increase speed by forming transistor regions and contact regions encircled by field regions in selfalignment structure.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP413677A JPS5389377A (en) | 1977-01-17 | 1977-01-17 | Semiconductor device and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP413677A JPS5389377A (en) | 1977-01-17 | 1977-01-17 | Semiconductor device and its production |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5389377A true JPS5389377A (en) | 1978-08-05 |
JPS6113392B2 JPS6113392B2 (en) | 1986-04-12 |
Family
ID=11576354
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP413677A Granted JPS5389377A (en) | 1977-01-17 | 1977-01-17 | Semiconductor device and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5389377A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007194562A (en) * | 2006-01-23 | 2007-08-02 | Nec Electronics Corp | Semiconductor device and its fabrication process |
-
1977
- 1977-01-17 JP JP413677A patent/JPS5389377A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007194562A (en) * | 2006-01-23 | 2007-08-02 | Nec Electronics Corp | Semiconductor device and its fabrication process |
Also Published As
Publication number | Publication date |
---|---|
JPS6113392B2 (en) | 1986-04-12 |
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