JPS5296873A - Mos type field effect transistor and its manufacture - Google Patents
Mos type field effect transistor and its manufactureInfo
- Publication number
- JPS5296873A JPS5296873A JP7573276A JP7573276A JPS5296873A JP S5296873 A JPS5296873 A JP S5296873A JP 7573276 A JP7573276 A JP 7573276A JP 7573276 A JP7573276 A JP 7573276A JP S5296873 A JPS5296873 A JP S5296873A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- field effect
- effect transistor
- type field
- mos type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enable MOS IC enabling multiple layer wiring without care of open wire, by self align system.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7573276A JPS5296873A (en) | 1976-06-26 | 1976-06-26 | Mos type field effect transistor and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7573276A JPS5296873A (en) | 1976-06-26 | 1976-06-26 | Mos type field effect transistor and its manufacture |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP46000799 Division | 1971-01-14 | 1971-01-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5296873A true JPS5296873A (en) | 1977-08-15 |
Family
ID=13584726
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7573276A Pending JPS5296873A (en) | 1976-06-26 | 1976-06-26 | Mos type field effect transistor and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5296873A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5599779A (en) * | 1979-01-24 | 1980-07-30 | Siemens Ag | Method of fabricating integrated mos circuit |
JPS5599778A (en) * | 1979-01-24 | 1980-07-30 | Mitsubishi Electric Corp | Insulated-gate type field effect transistor |
JPS5650575A (en) * | 1979-10-01 | 1981-05-07 | Seiko Epson Corp | Manufacture of semiconductor device |
JPS5673473A (en) * | 1979-11-06 | 1981-06-18 | Yokogawa Hewlett Packard Ltd | Manufacture of semiconductor element |
-
1976
- 1976-06-26 JP JP7573276A patent/JPS5296873A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5599779A (en) * | 1979-01-24 | 1980-07-30 | Siemens Ag | Method of fabricating integrated mos circuit |
JPS5599778A (en) * | 1979-01-24 | 1980-07-30 | Mitsubishi Electric Corp | Insulated-gate type field effect transistor |
JPH0235461B2 (en) * | 1979-01-24 | 1990-08-10 | Siemens Ag | |
JPS5650575A (en) * | 1979-10-01 | 1981-05-07 | Seiko Epson Corp | Manufacture of semiconductor device |
JPS5673473A (en) * | 1979-11-06 | 1981-06-18 | Yokogawa Hewlett Packard Ltd | Manufacture of semiconductor element |
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