JPS61132811A - 変位検出器 - Google Patents

変位検出器

Info

Publication number
JPS61132811A
JPS61132811A JP25461984A JP25461984A JPS61132811A JP S61132811 A JPS61132811 A JP S61132811A JP 25461984 A JP25461984 A JP 25461984A JP 25461984 A JP25461984 A JP 25461984A JP S61132811 A JPS61132811 A JP S61132811A
Authority
JP
Japan
Prior art keywords
image
light
half mirror
optical path
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25461984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0344642B2 (enrdf_load_stackoverflow
Inventor
Hitoshi Takabayashi
高林　均
Takahiro Nakamura
貴廣 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP25461984A priority Critical patent/JPS61132811A/ja
Publication of JPS61132811A publication Critical patent/JPS61132811A/ja
Publication of JPH0344642B2 publication Critical patent/JPH0344642B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP25461984A 1984-12-02 1984-12-02 変位検出器 Granted JPS61132811A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25461984A JPS61132811A (ja) 1984-12-02 1984-12-02 変位検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25461984A JPS61132811A (ja) 1984-12-02 1984-12-02 変位検出器

Publications (2)

Publication Number Publication Date
JPS61132811A true JPS61132811A (ja) 1986-06-20
JPH0344642B2 JPH0344642B2 (enrdf_load_stackoverflow) 1991-07-08

Family

ID=17267548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25461984A Granted JPS61132811A (ja) 1984-12-02 1984-12-02 変位検出器

Country Status (1)

Country Link
JP (1) JPS61132811A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02162205A (ja) * 1988-12-16 1990-06-21 Fujitsu Ltd パターン検査装置
JPH02503112A (ja) * 1988-02-01 1990-09-27 キャタピラー　インコーポレーテッド 表面形状情報を決定する方法及び装置
JPH05322561A (ja) * 1992-05-15 1993-12-07 Olympus Optical Co Ltd 焦点検出装置
JP2005326409A (ja) * 2004-05-12 2005-11-24 Leica Microsystems Semiconductor Gmbh 対象物を光学的に検査するための測定器およびこの測定器の作動方法
JP2013072796A (ja) * 2011-09-28 2013-04-22 Disco Abrasive Syst Ltd 高さ位置検出装置およびレーザー加工機

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5329159A (en) * 1976-08-31 1978-03-18 Anritsu Electric Co Ltd Optical distance measuring method and apparatus
JPS59125007A (ja) * 1982-12-29 1984-07-19 Matsushita Electric Works Ltd 距離測定装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5329159A (en) * 1976-08-31 1978-03-18 Anritsu Electric Co Ltd Optical distance measuring method and apparatus
JPS59125007A (ja) * 1982-12-29 1984-07-19 Matsushita Electric Works Ltd 距離測定装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02503112A (ja) * 1988-02-01 1990-09-27 キャタピラー　インコーポレーテッド 表面形状情報を決定する方法及び装置
JPH02162205A (ja) * 1988-12-16 1990-06-21 Fujitsu Ltd パターン検査装置
JPH05322561A (ja) * 1992-05-15 1993-12-07 Olympus Optical Co Ltd 焦点検出装置
JP2005326409A (ja) * 2004-05-12 2005-11-24 Leica Microsystems Semiconductor Gmbh 対象物を光学的に検査するための測定器およびこの測定器の作動方法
JP2013072796A (ja) * 2011-09-28 2013-04-22 Disco Abrasive Syst Ltd 高さ位置検出装置およびレーザー加工機

Also Published As

Publication number Publication date
JPH0344642B2 (enrdf_load_stackoverflow) 1991-07-08

Similar Documents

Publication Publication Date Title
US4698492A (en) Focus detector system with a distortion compensation mask
CN100529832C (zh) 标记位置检测装置
US4857720A (en) Focus detecting system using multiple portions of the image to be focussed
US4547663A (en) Focus detecting apparatus with a compensation mask
KR100207682B1 (ko) 광픽업장치의 레이저 비점격차 보상방법
JPS62168107A (ja) 焦点検出用光学系
JP2643326B2 (ja) 焦点検出装置を有した一眼レフカメラ
JPS61132811A (ja) 変位検出器
US4491402A (en) Method of focus detection
US4733062A (en) Focus detecting device
JPH11325887A (ja) 自動焦点検出装置の分岐光学系
JPS6227613A (ja) 位置検出装置
JP2002156578A (ja) 焦点検出装置、及びそれを備えた対物レンズ、光学顕微鏡又は光学検査装置
JPS6043234A (ja) 光デイスクヘツドのフオ−カスずれ検出装置
JPH02910A (ja) 焦点検出光学装置
JPH03277990A (ja) 微小物体検出用光電スイッチ
JPS6050638A (ja) 光信号検出装置
JPS59119545A (ja) 焦点ずれ検出方法
JPH04147207A (ja) 焦点検出装置
JPH0567340A (ja) 光学ヘツド及びその信号検出手段
JPS63138310A (ja) 焦点検出装置
JPH0269614A (ja) 変位センサ
SU1204986A1 (ru) Устройство дл контрол качества объективов
JPH04174336A (ja) ポリゴンミラー測定器
JP3746703B2 (ja) 焦点検出装置及びそれを備えた光学顕微鏡又は光学検査装置