JPH0344642B2 - - Google Patents

Info

Publication number
JPH0344642B2
JPH0344642B2 JP59254619A JP25461984A JPH0344642B2 JP H0344642 B2 JPH0344642 B2 JP H0344642B2 JP 59254619 A JP59254619 A JP 59254619A JP 25461984 A JP25461984 A JP 25461984A JP H0344642 B2 JPH0344642 B2 JP H0344642B2
Authority
JP
Japan
Prior art keywords
light
filter
image
optical path
half mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59254619A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61132811A (ja
Inventor
Hitoshi Takabayashi
Takahiro Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP25461984A priority Critical patent/JPS61132811A/ja
Publication of JPS61132811A publication Critical patent/JPS61132811A/ja
Publication of JPH0344642B2 publication Critical patent/JPH0344642B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP25461984A 1984-12-02 1984-12-02 変位検出器 Granted JPS61132811A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25461984A JPS61132811A (ja) 1984-12-02 1984-12-02 変位検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25461984A JPS61132811A (ja) 1984-12-02 1984-12-02 変位検出器

Publications (2)

Publication Number Publication Date
JPS61132811A JPS61132811A (ja) 1986-06-20
JPH0344642B2 true JPH0344642B2 (enrdf_load_stackoverflow) 1991-07-08

Family

ID=17267548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25461984A Granted JPS61132811A (ja) 1984-12-02 1984-12-02 変位検出器

Country Status (1)

Country Link
JP (1) JPS61132811A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4850712A (en) * 1988-02-01 1989-07-25 Caterpillar Inc. Method and system for determining surface profile information
JP2543585B2 (ja) * 1988-12-16 1996-10-16 富士通株式会社 パタ―ン検査装置
JP3255703B2 (ja) * 1992-05-15 2002-02-12 オリンパス光学工業株式会社 焦点検出装置
DE102004023739A1 (de) * 2004-05-12 2005-12-15 Leica Microsystems Semiconductor Gmbh Messgerät und Verfahren zum Betreiben eines Messgeräts zur optischen Inspektion eines Objekts
JP5851784B2 (ja) * 2011-09-28 2016-02-03 株式会社ディスコ 高さ位置検出装置およびレーザー加工機

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5329159A (en) * 1976-08-31 1978-03-18 Anritsu Electric Co Ltd Optical distance measuring method and apparatus
JPS59125007A (ja) * 1982-12-29 1984-07-19 Matsushita Electric Works Ltd 距離測定装置

Also Published As

Publication number Publication date
JPS61132811A (ja) 1986-06-20

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